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研究生: 陳維浩
Chen, Wei-Hao
論文名稱: 使用原子層沉積法成長氧硫化鋅緩衝層的無鎘/無毒銅鋅錫硫硒太陽能電池
Cadmium Free / Non-toxic CZTSSe Solar Cells Using Atomic Layer Deposited Zn(O,S) Buffer Layers
指導教授: 陳貴賢
Chen, Kuei-Hsien
陳政營
Chen, Cheng-Ying
林麗瓊
Chen, Li-Chyong
學位類別: 碩士
Master
系所名稱: 化學系
Department of Chemistry
論文出版年: 2020
畢業學年度: 108
語文別: 英文
論文頁數: 99
中文關鍵詞: 銅鋅錫硫硒薄膜太陽能電池原子層沉積法無鎘緩衝層氧硫化鋅異質接面導帶位障差異
英文關鍵詞: CZTSSe, Thin-film solar cells, Atomic layer deposition, Cadmium-free buffer layer, Zinc oxysulfide, Heterojunction, Conduction band offset
DOI URL: http://doi.org/10.6345/NTNU202000938
論文種類: 學術論文
相關次數: 點閱:133下載:0
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  • 致謝 I 中文摘要 II Abstract IV Table of Contents VI List of Tables IX List of Figures IX Chapter 1、Introduction 1 1-1 Status of global energy 1 1-2 Solar energy 2 1-3 Background of study 6 1-4 Basics of Kesterite thin film solar cell 10 1-5 Motivation 13 Chapter 2、Literature review 16 2.1 Basic solar cell theory 16 2-1-1 Principle of the solar cell working 16 2-1-2 Principle of the solar absorption of semiconductor materials 19 2-1-3 Solar cell efficiency conversion 23 2-2 Introduction of CZTSSe solar cell each layers 27 2-2-1 Soda lime glass 28 2-2-2 Molybdenum metal back electrode 28 2-2-3 CZTSSe (absorber layer) 29 2-2-4 CdS (buffer layer) 31 2-2-5 Window layer 34 2-2-6 Front contact 34 2-2-7 Anti-reflection layer 35 2-3 Open circuit voltage (Voc) deficit 35 2-3-1 Interface defect recombination 36 2-3-2 Conduction band offset (CBO) 37 2-4 The basis of Atomic layer deposition (ALD) 38 2-5 Properties of ZnO vs ZnS 40 2-6 Zn(O,S) (buffer layer) 41 2-7 Preparation of Zn(O,S) with Chemical Bath Deposition (CBD) vs Atomic Layer Deposition (ALD) 42 Chapter 3、Experimental procedures and equipment 45 3-1 Experimental steps 45 3-1-1 Substrate preparation 45 3-1-2 Preparation of metal precursors 45 3-1-3 Sulfur-selenization process 47 3-1-4 CdS (Buffer layer) 48 3-1-5 Zn(O,S) (buffer layer) 48 3-1-6 Window layer 50 3-1-7 Anti-reflective layer 50 3-2 Process instrument introduction 51 3-2-1 Sputtering system 51 3-2-2 High temperature furnace tube 54 3-2-3 Chemical bath deposition system 55 3-2-4 Thermal evaporator system 56 3-2-5 Homemade atomic layer deposition system 57 3-3 Introduction of analytical instrument 61 3-3-1 X-ray photoelectron spectroscopy (XPS) 61 3-3-2 X-ray Diffractometer (XRD) 62 3-3-3 Ultraviolet-visible spectroscopy (UV-Vis) 63 3-3-4 Solar simulator 64 3-3-5 External quantum efficiency (EQE) 65 3-3-6 Scanning transmission electron microscopy (STEM) 66 Chapter 4、Results and discussion 68 4-1 Pressure stability test of H2S 68 4-2 Controlling of S/(O+S) ratio by ZnO/ZnS cycle ratio 69 4-3 Composition analysis of Zn(O,S) for different S/(O+S) ratio by XPS 71 4-4 Optical properties of Zn(O,S) for different S/(O+S) ratio by Ultraviolet-visible spectroscopy (UV-Vis) 74 4-5 CZTSSe/Zn(O,S) interface by Scanning Transmission Electron Microscopy (STEM) 77 4-6 Thickness effect of Zn(O,S) for device performance 79 4-7 Different S/(O+S) of Zn(O,S) for device performance 80 4-8 Band position of CZTSSe/Zn(O,S) 84 4-9 Structure analysis of Zn(O,S) for different S/(O+S) ratio by XRD 86 Chapter 5、Conclusion 90 Reference 92

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