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研究生： 張岷益
Ming-Yi Chang
論文名稱： 二硼化鎂超導微波濾波器設計及製作
Design and Fabrication of MgB2 Microwave Filter
指導教授： 張秋男
學位類別： 碩士
Master
系所名稱： 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年： 2006
畢業學年度： 94
語文別： 中文
論文頁數： 81
中文關鍵詞： 二硼化鎂 、微波濾波器
英文關鍵詞： MgB2, Filter, Microwave
論文種類： 學術論文
相關次數： 點閱：306  下載：51 
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    • 本論文的研究目的在於利用我們實驗室自己濺鍍成長出來的金屬性超導體－二硼化鎂（MgB2）薄膜，配合微影蝕刻等黃光室製程，來設計及製作微小型的微波濾波器元件，並研究其濾波效果。在T 10K時，實驗量測出來平均插入損耗在0.5dB以下，接近由電腦軟體所模擬出來的結果。帶通濾波的中心頻率頻約在6GHz。此項成品體積（大小約5mm × 5mm × 0.5mm），將可以應用於無線網路、無線通訊系統上。

    目錄 第一章 緒論 1-1 研究動機.......................................................................................1 1-2 超導體MgB2簡介........................................................................1 1-3 超導微波濾波器簡介...................................................................4 1-4 論文組織架構概要.......................................................................4 第二章 理論分析及元件設計 2-1 射頻（RF）& 微波（Microwave）簡介..................................5 2-2 共面波導（coplanar waveguide）..............................................7 2-3 散射參數（Scattering parameter）...........................................10 2-4 帶通濾波器原理及設計............................................................12 2-4-1 濾波器設計原理簡介......................................................12 2-4-2 濾波器設計原理..............................................................15 2-5 電腦軟體模擬（Agilent Advanced Design System）..............27 第三章 濾波器實作與量測 3-1 MgB2超導薄膜製備...................................................................30 3-1-1 RF磁控濺鍍設備介紹.....................................................32 3-1-2 MgB2超導薄膜製備流程................................................35 3-2光罩製作.....................................................................................39 3-2-1 光罩製作系統介紹..........................................................39 3-2-2 光罩製作流程..................................................................40 3-3 黃光室微影蝕刻........................................................................41 3-3-1 微影蝕刻機台系統介紹..................................................41 3-3-2 曝光顯影蝕刻流程..........................................................41 3-4 微波特性量測............................................................................45 3-4-1 量測系統介紹(向量網路分析儀N5230A)...................45 3-4-2 量測流程..........................................................................47 第四章 量測結果分析與討論 4-1 薄膜特性量測與分析................................................................51 4-2微波量測的結果.........................................................................57 4-3 影響濾波器響應的原因............................................................61 4-4 改善方法....................................................................................66 第五章 結論 5-1 總結............................................................................................67 5-2 未來展望....................................................................................67 參考文獻..................................................................................................70 附錄A.......................................................................................................75 附錄B.......................................................................................................76 圖表索引 表1-1 MgB2與YBCO比較表..................................................................3 表1-2 無線網路規格表............................................................................4 表2-1 等漣波低通濾波器原型的元件值（g0=1, , N=1~10）.......20 表2-2 各種濾波器所對應之低通濾波器原型的電感、電容轉換表....23 表2-3 濾波器圖形參數表......................................................................28 表2-4 模擬所使用之各項參數表..........................................................29 表3-1 濺鍍參數表..................................................................................37 表4-1 TF121與TF122製備條件與TC..................................................51 表4-2 TF121與TF122臨界溫度與平整度表........................................55 表4-3 模擬與量結果比較表..................................................................58 表4-4 元件TF121不同溫度各項特性表...............................................59 表4-5元件TF122不同溫度各項特性表...............................................58 圖2-1 微波通訊系統圖............................................................................6 圖2-2 單一平面結構(a)槽線 (b)共面帶線 (c)共面波導.......................9 圖2-3 共面波導結構(a)3D結構圖 (b)剖視圖........................................9 圖2-4 雙埠網路(a)電壓波電流波示意圖 (b)反射透射示意圖............12 圖2-5 CPW式髮夾梳形濾波器(a)平面電路圖 (b)等效電路圖............13 圖2-6 濾波器設計流程圖.......................................................................14 圖2-7各式濾波器頻率響應圖................................................................16 圖2-8 N=2的低通波器原型.................................................................19 圖2-9 低通波器原型之階梯電路及其元件定義..............................19 圖2-10 (a)低通濾波器原型的響應曲線 (b)帶通濾波器的頻率響應曲線..............................................................................................................23 圖2-11 改變兩共振器之間距離之頻率響應圖.....................................26 圖2-12 濾波器圖形及各項參數............................................................28 圖2-13 超導濾波器模擬之頻率響應圖................................................28 圖3-1 (a)不銹鋼容器（cell）設計圖 (b)實體圖...................................31 圖3-2 磁控濺鍍系統示意圖..................................................................34 圖3-3 高溫爐裝置示意圖......................................................................35 圖3-4 (a)光罩實體圖 (b)局部放大圖....................................................39 圖3-5 (a)等向性及 (b)非等向性蝕刻結構剖面圖................................41 圖3-6曝光顯影蝕刻流程圖...................................................................44 圖3-7 (a)元件TF121 (b)元件TF122.......................................................45 圖3-8 低溫量測系統剖面圖..................................................................46 圖3-9 整體量測系統示意圖..................................................................46 圖3-10 樣品座裝置圖............................................................................50 圖3-11 樣品座(a)俯視圖 (b)側視圖.....................................................50 圖4-1 (a)R-T溫度-電阻量測曲線 (b)TC附近的放大圖.......................52 圖4-2 (a)(b)TF121以AFM原子力顯微鏡作表面分析.........................53 圖4-3 (a)(b)TF122以AFM原子力顯微鏡作表面分析.........................53 圖4-4 (a)元件TF121 (b)元件TF122AFM測厚結果..............................55 圖4-5 (a)(b)TF121 (c)(d)元件TF122以光學顯微鏡觀察之影像..........56 圖4-6 元件TF121之散射頻率響應圖...................................................57 圖4-7 元件TF122之散射頻率響應圖...................................................57 圖4-8 元件TF121不同溫度之S21頻率響應圖.....................................58 圖4-9 元件TF122不同溫度之S21頻率響應圖.....................................59 圖4-10 元件TF121及元件TF122不同溫度之頻寬曲線圖.................60 圖4-11 元件TF121及元件TF122不同溫度之中心頻率曲線圖.........60 圖4-12 元件TF121及元件TF122不同溫度之插入損耗曲線圖.........60 圖4-13 硼的K-edge近緣X光吸收光譜................................................62 圖4-14 氧的K-edge近緣X光吸收光譜................................................62 圖4-15 鎂的K-edge近緣X光吸收光譜................................................62 圖4-16 六階髮夾梳型帶通濾波器圖形................................................64 圖4-17 元件YL1108之散射參數頻率響應圖......................................64 圖4-18 元件YL1108不同溫度之S21頻率響應圖.................................64 圖4-19 元件YL1108不同溫度之中心頻率曲線圖..............................65 圖4-20 元件YL1108損耗曲線圖..........................................................65 圖5-1 超高真蒸鍍系統圖(a)正視圖 (b)剖視圖...................................68

    參考文獻
    [1] S. Wuensch, E. Crocoll, M. Neuhaus, T. A. Scherer, A. Stassen, H.-J, Wermund, W. Jutzi, and O. Lochner, “A 9 Pole Bandpass Filter at 2.7 GHz With YBCO Coplanar Wave Guides on a Sapphire Substrate,” IEEE Transactions on Applied Superconductivity, Vol. 13, No. 2, JUNE 2003.
    [2] Zhewang Ma, Hideyuki Suzuki, and Yoshio Kobayashi, “A Low-Loss 5GHz Bandpass Filter Using HTS Coplanar Waveguide Quarter-Wavelength Resonators,” IEEE Trans. Microwave Theory Tech, Digest 2002.
    [3] Atsushi Sanada, Takahiro Hamamura, Ikuo Awai, “Design of A High-TC Superconducting Bandpass filter using CPW Meaner-Line Parallel-Circuited Resonators,” Proceedings of APMC2001, Taipei, Taiwan, R.O.C.
    [4] K. Yoshida, K. Sashiyama, S. Nishioka, H. Shimakage and Z. Wang, “Design and Performance of Miniaturized Superconducting Coplanar Waveguide Filters,” IEEE Transactions on Applied Superconductivity, Vol. 9, No. 2, June 1999.
    [5] Keiji Yoshida, Atsushi Mori, Haruichi Kanaya, “Superconducting small antenna combined with a bandpass filter,” Physica C, Elsevier Science B.V., 2002.
    [6] Hyeong-Jin Kim, W. N. Kang, Eun-Mi Choi, Mun-Seog Kim, Kijoon H. P. Kim, and Sung-Ik Lee, “High Current-Carrying Capability in c-Axis-Oriented Superconducting MgB2 Thin Films,” Physical Review Letters, Vol. 87, No. 8, 20 August 2001.
    [7] Antonello Andreone, Antonio Cassinese, Fabio Chiarella, Roberto Di Capua, Emiliano Di Gennaro, Gianrico Lamura, Maria Grazia Maglione, Macro Salluzzo, and Ruggero Vaglio, “In Situ Sputtering Growth and Characterization of MgB2 Films for Microwave Applications,” IEEE Trans. Microwave Theory Tech. , Vol. 13, NO. 2, pp. 3602- 3605, June 2003.
    [8] James C. Booth, Sang Young Lee, K. T. Leong, J. H. Lee, J. Lim, H. N. Lee, S. H. Moon, and B. Oh, “Microwave Surface Impedance and Nonlinear properties of MgB2 Films,” IEEE Trans. Microwave Theory Tech. , Vol. 13, NO. 2, pp. 3590- 3593, June 2003.
    [9] N. Klein, B. B. Jin, R. Wordenweber, P. Lahl, W. N. Kang, Hyeong-Jin Kim, Eun-Mi Choi, Sung-IK Lee, T. Dahm, and K. Maki, “Microwave Properties of MgB2 Thin Films,” IEEE Trans. Microwave Theory Tech. , Vol. 13, NO. 2, pp. 3252- 3256, June 2003.
    [10]
    [11] 張振元, “共面波導帶通濾波器之設計”,國立台灣大學電信工程研究所碩士論文, 2001.
    [12] C.P. Wen, “Coplanar waveguide: A surface strip transmission line suitable for nonreciprocal gyromagnetic device application,” IEEE Trans. Microwave Theory Tech. , Vol. MTT-17, pp.1087- 1090 Dec.1969.
    [13] Khelifa Hettak, Nihad Dib, Amjad Omar, Gilles-Y. Delisle, Malcolm Stubbs, and Serge Toutain, “A Useful New Class of Miniature CPW Shunt Stubs and its Impact on Millimeter-Wave Integrated Circuits,” IEEE Trans. Microwave Theory Tech. , Vol. 47, NO. 12, pp.2340- 2349,
    Dec. 1999.
    [14] M. Matsuo, and H. Yabuki, and M. Makimoto, “The design of a half-waveguide resonators BPF with attenuation poles at desired frequencies, ” IEEE Trans. Microwave Theory Tech, Digest 2000.
    [15] Mohsen Naghed, Matthias Rittweger and Ingo Wolff, “A new method for the calculation of the equivalent inductances of coplanar waveguide discontinuities,” IEEE Trans. Microwave Theory Tech, Digest 1991.
    [16] David M. Pozar, Microwave Engineering, second edition, 1998.
    [17] Tatsuya. Tsujiguchi, Haruo. Matsumoto, and Toshio Nishikawa, “A Miniaturized End-Coupled Bandpass Filter Using λ/4 Hair-Pin Coplanar Resonators, ” IEEE Trans. Microwave Theory Tech, Digest 1998.
    [18] J. S. Hong and M. J. Lancaster, IEEE Trans. Microwave Theory Tech., vol. 46, pp. 118-122, Jan 1998.
    [19] G. L. Matthaei, L. Young, and E. M. Jones, “Microwave Filter, Impedance-Matching Networks, and Coupling Structures,” 1980.
    [20] 徐泓璋，“MgB2超導薄膜特性與微橋製作”，台師大光電所九十三學年度碩士班畢業論文.
    [21] 吳良彥，“濺鍍MgB2薄膜的X光吸收光譜”，台師大物理系九十二學年度碩士班畢業論文.
    [22] 楊啟榮博士，“微機電系統原理與應用”，台師大機電所.
    [23] David Ballo, “Network Analyzer Basics,” Hewlett-Packard Company, 1998.
    [24] Masaya Okuzono, Toshiya Doi, Yuichiro Ishizaki, Yuki Kobayashi, Yoshinori Hakuraku, and Hitoshi Kitaguchi, “As-Grown Superconductor MgB2 films Prepared by Electron Beam Deposition,” IEEE Transactions On Applied Superconductivity, Vol. 15, No. 2, June 2005.
    [25] Yo-Shen Lin, Wei-Chih Ku, Chi-Hsueh Wang, and Chun Hsiung Chen, “Wideband Coplanar-Waveguide Bandpass Filters With Good Stopband Rejection,” IEEE Microwave And Wireless Components Letters, Vol. 14, No. 9, September 2004.
    [26] Dawei Zhang, G.-C. Liang, C. F. Shih, “Compact forward-coupled superconducting microstrip filters for cellular communication,” IEEE Transactions On Applied Superconductivity, Vol. 5, No. 2, June 1995.
    [27] Sang Yeol Lee and Kwang Yong Kang, “Fabrication of YBCO superconducting dual mode resonator for satellite communication,” IEEE Transactions On Applied Superconductivity, Vol. 5, No. 2, June 1995.
    [28] B. A. Aminov, A. Baumfalk, H. J. Chaloupka, “High-Q tunable YBCO disk resonator filters for transmitter combiners in radio base stations,” IEEE Trans. Microwave Theory Tech, Digest 1998.
    [29] 劉祥麟老師, 曹士林老師, 張秋男老師, “國立台灣師範大學九十四年度學術研究計畫”.
    [30] Ralph Levy, and Seymour B. Cohn, “A History of Microwave Filter Reasearch, Design, and Development,” IEEE Transactions on Microwave Theory and Techniques, Vol. MTT-32, No. 9, September 1984.
    [31] 陳錡楓，“微小型高溫超導微波濾器之設計與製作”，國立交通大學電子物理系九十學年度碩士班畢業論文.
    [32] Genichi Tsuzuki, Shen Ye, and Stuart Berkowitz, “Ultra Selective HTS Bandpass Filter for 3G Wireless Application,” IEEE Transactions On Applied Superconductivity, Vol. 13, No. 2, June 2003.
    [33] Hee-Sauk Jhon, Chang Hoon Jeon, Kyoung Bo Han, Seong Sik Myoung, Jong Gwan Yook, Q. X. Jia, and Sang Yeol Lee, “Realization of HTS Trisection Band Pass Filter,” IEEE Transactions On Applied Superconductivity, Vol. 13, No. 2, June 2003.
    [34] H. Kanaya, J. Fujiyama, R. Oba, and K. Yoshida, “Design Method of Miniaturized HTS Coplanar Waveguide Bandpass Filters Using Cross Coupling,” IEEE Transactions On Applied Superconductivity, Vol. 13, No. 2, June 2003.
    [35] 何秉隆，“新奇超導體（Mg1-xAlx）B2的超導性研究”，國立中山大學物理研究所九十學年度碩士班畢業論文.
    [36] 朱心華，“超導Y-Ba-Cu-O的微波表面阻抗”，國立清華大學物理系八十八學年度碩士班畢業論文.
    [37] 陳瑞彥，“高溫超導微波濾波器之設計與製作”，國立交通大學電子物理系九十一學年度碩士班畢業論文.
    [48] Agilent Advanced Design System 2003A, from Agilent Company.

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