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研究生：	馬凱俊 Ma, Kai-Chun
論文名稱：	運用共平面波導探測鐵磁薄膜的鐵磁共振及自旋幫浦效應 Using Coplanar Waveguide to Detect Ferromagnetic Resonance and Spin Pumping Effect
指導教授：	江佩勳 Jiang, Pei-hsun
學位類別：	碩士 Master
系所名稱：	物理學系 Department of Physics
論文出版年：	2016
畢業學年度：	104
語文別：	中文
論文頁數：	58
中文關鍵詞：	共平面波導、鐵磁共振、自旋幫浦效應、逆自旋霍爾效應
英文關鍵詞：	coplanar waveguide, ferromagnetic resonance, spin pumping effect, inverse spin Hall effect
DOI URL：	https://doi.org/10.6345/NTNU202203652
論文種類：	學術論文
相關次數：	點閱：127 下載：3
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本實驗主要探討鐵磁性物質的自旋幫浦效應（spin pumping effect, SPE），主要是鐵磁性物質，選用鎳鐵合金（permalloy, Py, Ni80Fe20）及鈷（cobalt, Co）和一般金屬，選用鉑（platinum, Pt）所組成的雙層薄膜結構。鐵磁共振（ferromagnetic resonance, FMR）現象在鐵磁/一般金屬雙層薄膜結構中，可使其鐵磁層產生一自旋流（spin current）注入一般金屬層，稱之為自旋幫浦效應。自旋流跨過鐵磁/一般金屬雙層薄膜之介面時，不同自旋方向的電子由於自旋軌道耦合作用（spin-orbit coupling, SOC），會引致逆自旋霍爾效應（inverse spin Hall effect, ISHE）並產生一橫向電荷流。
　　我們利用了共平面波導（coplanar waveguide, CPW）來探測鐵磁共振（ferromagnetic resonance, FMR）現象，以及利用設計於鐵磁/一般金屬雙層薄膜結構上的直流量測導線測量經由逆自旋霍爾效應引致的電荷訊號。

My research focuses on the spin pumping effect（SPE）in bilayer structures of ferromagnetic materials（FM）and normal materials（NM）. In our experiment, we choose permalloy（Ni80Fe20, Py）or cobalt（Co）as the FM layer and platinum（Pt）as the NM layer. Ferromagnetic resonance（FMR）in the FM/NM bilayer can induce spin pumping from FM layer to NM layer, and the spin-orbit coupling（SOC）in the platinum layer leads to the inverse spin Hall effect（ISHE）, generating a charge signal.
　　We use coplanar waveguides（CPW）to detect ferromagnetic resonance in FM layer, and designed dc contacts on the bilayer structure to measure charge signals from the inverse spin Hall effect.

1　理論介紹 ………………………………………………………6
1　磁性物質…………………………………………………… 6
1.1　磁性物質的種類………………..…………………………6
1.2　鐵磁性物質的特性…………………………………..……8
1.3　磁異向性簡介……………………………………..………9
2　鐵磁共振（ferromagnetic resonance, FMR）…………12
2.1　Landau-Lifshitz-Gilbert equation（L-L-G eq.）…….14
3　自旋幫浦效應（spin pumping effect, SPE）……..……15
4　逆自旋霍爾效應（inverse spin Hall effect, ISHE）……15
5　自旋整流效應（spin rectification effect, SRE）……….16
6　共平面波導（coplanar waveguide, CPW）…….......…17
2　實驗儀器介紹………………………………...……………...19
1　掃描式電子顯微鏡 …………………….………….....……19
2　蒸鍍系統 ……………………..……………………………20
2.1　熱電阻蒸鍍系統（thermal evaporation） ……………21
2.2　電子束蒸鍍系統（electron beam evaporation）….…22
2.3　脈衝雷射蒸鍍系統（pulsed laser deposition, PLD）..24
3　向量網路分析儀 ………………………….………………..26
3　鐵磁薄膜樣品製作流程及實驗方法 ………………………...29
1　Co、Co/Pt；Py、Py/Pt 薄膜樣品製作流程……………..29
1.1　黃光微影術（photo lithography）……………………..29
1.1.1　光罩設計與製作………………………………………..30
1.1.2　黃光微影術製作流程…………………………………..36
1.2　電子束微影術（electron beam lithography, EBL）….39
1.3　熱電阻式蒸鍍製程 …………………………………...….41
1.4　電子束蒸鍍製程 ………………………………………....42
1.5　脈衝雷射蒸鍍製程 ………………………………………43
2　實驗測量方法 ……………………………………………...45
4　結果與討論 …………………………………………………..48
1　量測鐵磁共振時的共振磁場及飽和磁化量 ………………48
2　比較吸收峰值半高寬 及阻尼常數…………………………51
5　未來展望………………………………………………………55
6　參考文獻………………………………………………………56
                                

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