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研究生：	黃資淵 Huang Tz-Yuan
論文名稱：	鉺離子佈植波導之特性研究與應用 Study of the Unique Properties and Applications of Erbium Ion Implanted Waveguide
指導教授：	曹士林 Tsao, Shyh-Lin 彭保仁 Pong, Bao-Jen
學位類別：	碩士 Master
系所名稱：	光電工程研究所 Graduate Institute of Electro-Optical Engineering
論文出版年：	2007
畢業學年度：	95
語文別：	英文
論文頁數：	104
中文關鍵詞：	掺鉺波導、光放大器、離子植入法、平面光波導、透鏡光纖、多模干涉脊狀波導
英文關鍵詞：	Erbium doped waveguide, optical amplifier, ion implantation, planar optical waveguide, Lensed fiber, multi-mode interference waveguide
論文種類：	學術論文
相關次數：	點閱：107 下載：5
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在單根掺鉺波導放大器(EDWA)中，我們研究單根波導之不同長度及不同激發雷射能量產生不同之淨增益，並讓該掺鉺波導在不同的長度範圍與數種激發雷射能量的比較下，分析其可產生最大增益之長度。我們也將其放入分波多工系統中分析其在不同的波長與激發能量之間的關係並整理增益與雜訊指數之平坦度。
在2 x 2掺鉺多模干涉波導實驗方面，我們將一個2 × 2通道的多模干涉脊狀波導藉由離子植入法將鉺離子打入波導中，並以1550nm可調雷射、準直鏡、單模光纖與光頻譜儀建構成之對光系統去量測其信號之變化，並研究結合掺鉺平面光波導放大器與分波多工元件之可行性。

In single erbium doped waveguide amplifier (EDWA), we research single waveguide of various lengths and pump power to produce different net gain and compare with different ranges of length and pump power to get the maximum gain at length. We also insert EDWA into WDM system to analyze the performance between various wavelengths and pump powers and analyze the flatness of gain and noise figure.
In experiment of 2x2 Erbium doped MMI waveguide, we implanted the ion of erbium into the 2x2 Multimode Interference (MMI) waveguide by ion implantation, and with 1550nm tunable laser, collimater, single mode fiber and optical spectrum analyzer (OSA) is formed an alignment system to measure and examine the change of output signal, and we study the feasibility of combining erbium doped waveguide optical amplifier and WDM element.

Contents
Chinese Abstract…………………………………………………………i
English Abstract………………………………...…………………….....ii
Acknowledgment………………………………………………………..iii
Contents ………………………………………….……….………..….…iv
List of Figures ………………………………………………...…...…..vii
List of Tables ……………………………………….….……….….…xiii

Chapter 1 Introduction…………………………………......……1

Chapter 2 Study of Single Mode Rib Waveguide Based on SOI Substrate and Erbium Doped Waveguide Amplifier……..………………………..……8

2-1 Single Mode Rib Waveguid………………….. ………….…......………9
2-2 Basis of Optical Amplifier…….………………………...……………..10
2-3 Introduction of Technique of Erbium-doped Waveguide Amplifier…...14
2-3-1 Gain of Optical Planar waveguide Amplifier…………………...15
2-3-2 Rate Equation for the Three-Level Model of Er3+………………………..25
     2-3-2-1 Normalized Steady-State Population Difference……….27
2-3-2-2 Gain of the Amplifier…………………………………...29
   2-3-3 Advantage and Disadvantage between 1.48μm and 0.98μm Pump Light....................................................................................32
2-4 Simulation Results and Analysis of Erbium-Doped Waveguide Amplifier
   ………………………………………………………………………….36
2-5 Summary…………………...…………………………………..………38

Chapter 3 Performance Analysis of Applying Erbium-doped Waveguide Amplifier to a Dense Wavelength Division Multiplexer Network............................47

3-1 Introduction of the basics of Arrayed Waveguide Grating……………..47
3-2 Introduction of Integrated EDWA and AWG DEMUX………………...49
3-3 Noise from Optical Amplification……………………………………...52
3-4 Performance Analysis of the N x 1 MUX, Erbium-doped Waveguide Amplifier, and 1 x N DEMUX applying on DWDM optical network...56
   3-4-1 Analysis of 8x1 MUX/1x8DEMUX and EDWA………………...57
3-4-2 Analysis of 16x1 MUX/1x16DEMUX and EDWA……………...58
3-4-3 Analysis of 32x1 MUX/1x32DEMUX and EDWA……………...59
3-4-4 Analysis of 64x1 MUX/1x64DEMUX and EDWA……………...61
3-5 Summary……………………………………………………………….62

Chapter 4 Experimental Results of Erbium Doped MMI
           Waveguide Based on SOI Substrate by Ion
           Implantation……………………………………...71

4-1 Introduction of UNIBOND SOI Wafer with “Smart-Cut
     Process”………………………………………..………………72
4-2 Introduction of Ion Implantation…………………………….…………74
4-3 Experimental Results of Erbium Doped MMI Waveguide Amplifier…78
4-4 Summary…………..……………………….…………………………..80

Chapter 5 Conclusions…………..……………………………...93

References..…………………...…………………………………96

Publication Lists.…………….….………………….….…….....xiv

List of Figures

Fig. 1-1    An example of a silicon based optical integrated circuit in which a
1x4 splitter is combined with an amplifying section………………6
Fig. 1-2    Energy level diagram of Er3+……………………………...……6
Fig. 2-1    Structure of single mode Silicon on Insulator rib waveguide of Arrayed Waveguide Grating………………….…...………..39
Fig. 2-2    Mode pattern of the single rib waveguide………….........….…....39
Fig. 2-3    Principle of a three-level amplifier…………………….....….40
Fig. 2-4    Transitions between two energy levels. (a) Spontaneous emission (b) Stimulated emission (c)Stimulated absorpion….40
Fig. 2-5    Fictitious moving pill box in a waveguide amplifier…….….41
Fig. 2-6    Schematic structure of transmitted beam with single mode fiber into input single waveguide……………………….…………… .41
Fig. 2-7    Picture of equivalent of an optical amplifier………...…..42
Fig. 2-8    Three level model for Er3+ doped waveguide amplifier…...……42
Fig. 2-9    Population difference versus normalized pumping rate with signal power and β as parameters…………...….43
Fig. 2-10     Energy level diagram of Er3+............................………..……43
Fig. 2-11     Excited state absorption (ESA)…………………………….…...44
Fig. 2-12     Schematic diagram of single channel Erbium doped waveguide
amplifier………………..………………………………………44
Fig. 2-13     Relationship of Gain and Pump power of different length
waveguide amplifier from 0.02m to 0.1m………………...……45
Fig. 2-14      Relationship of Gain and Pump power of different length
waveguide amplifier from 0.1m to 0.5m……………………...45
Fig. 2-15     Relationship of Noise figure and Pump power of different length
waveguide amplifier from 0.1m to 0.5m…………...…………..46

Fig. 3-1    Schematic diagram of Wavelength Division Multiplexer (WDM)
.......................................................................................................63
Fig. 3-2    Schematic view of integrated EDWA and AWG DEMUX………63
Fig. 3-3    Simulation results of Gain and Wavelength of 8x1 MUX, EDWA and 1x8 DEMUX……………………………...…………………64
Fig. 3-4    Simulation results of Noise figure and wavelength of 8x1 MUX,
EDWA and 1x8 DEMUX……………………………...………...64
Fig. 3-5    Simulation results of Gain and Wavelength of 16x1 MUX, EDWA and 1x16 DEMUX………………………………………….........65
Fig. 3-6    Simulation results of Noise figure and wavelength of 16x1 MUX,
EDWA and 1x16 DEMUX………………………………...…….65
Fig. 3-7    Simulation results of Gain and Wavelength of 32x1 MUX, EDWA and 1x32 DEMUX…...……………………………………......…66
Fig. 3-8    Simulation results of Noise figure and wavelength of 32x1 MUX,
EDWA and 1x32 DEMUX………………………………….…...66
Fig. 3-9    The schematic diagram of the integrated 64x1 MUX, EDWA, and 1x64 DEMUX…………………………………………………67
Fig. 3-10    Simulation results of Gain and Wavelength of 64x1 MUX,EDWA
And 1x64 DEMUX……..……………………………………….68
Fig. 3-11    Simulation results of Noise figure and wavelength of 64x1 MUX,
EDWA and 1x64 DEMUX….…………………………………...68

Fig. 4-1    Method of UNIBOND SOI……………........................................82
Fig. 4-2    Procedure of ion implantation………………………...…..……...82
Fig. 4-3    Procedure of mass analyzer…………………………...…………83
Fig. 4-4    Procedure of Electrostatic Deflector…………………………......83
Fig. 4-5    Picture of the dose and the depth of Er3+ under the Silicon surface …………………………………………………………...84
Fig. 4-6    Input port and output port of Er3+ MMI by SEM…………….…..84
Fig. 4-7    Cross section of the SOI single mode rib waveguide by SEM .....85
Fig. 4-8    First experimental setups for measuring the output beam from the one channel of 2 output ports of MMI with source wavelength = 1550nm……………………………………………………..……86
Fig. 4-9     Second experimental setups for measuring the output beam from
the one channel of 2 output ports of MMI with source wavelength = 1550nm………………………………………………….……87
Fig. 4-10     Picture of first experiment frame with measuring optical 2×2
MMI waveguide………………….….…………………………88
Fig. 4-11     Picture of second experiment frame with measuring optical 2×2
MMI waveguide……………………………………...………...88
Fig. 4-12     Output mode pattern of one channel of 2x2 MMI………..….....89
Fig. 4-13     980nm pump laser optical power: 0mW……..…………………89
Fig. 4-14     980nm pump laser optical power: 16mW………………………90
Fig. 4-15     980nm pump laser optical power: 21mW………………………90
Fig. 4-16     980nm pump laser optical power: 28mW………………………91
Fig. 4-17     980nm pump laser optical power: 34mW………………………91
Fig. 4-18     980nm pump laser optical power: 78mW………………………92
Fig. 4-19     Relationship between pump power and output power at
1549nm………………………………..………………….….....92
List of Tables
Table I.    Characteristics of Er doped planar optical waveguide amplifiers operating at 1.54μm that have been fabricated on silicon to date ………………………………………………………………7
Table II.    Comparison of maximum gain and noise figure of four kinds of
Nx1 MUX, 1xN DEMUX and Er3+ waveguide amplifier……………………………………………………...…69
Table III.    Comparison of the flatness of  gain and noise figure of four
kinds of Nx1 MUX, 1xN DEMUX and Er3+ waveguide amplifier.
………………………………………………………………….70
                                

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