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研究生: 馬康耀
Ma, Kang-Yao
論文名稱: 利用雷射對富勒烯/二硫化鉬異質結構的效應雕製微觀圖形
Laser-induced effects in C60/MoS2 heterostructure: desorption and patterned photo-luminance
指導教授: 林文欽
Lin, Wen-Chin
學位類別: 碩士
Master
系所名稱: 物理學系
Department of Physics
論文出版年: 2020
畢業學年度: 108
語文別: 中文
論文頁數: 51
中文關鍵詞: 富勒烯拉曼雷射二硫化鉬
英文關鍵詞: Desorption
DOI URL: http://doi.org/10.6345/NTNU202001255
論文種類: 學術論文
相關次數: 點閱:158下載:7
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  • 本次實驗的內容主要在探討,成長於二氧化矽(SiO2)基板上的二硫化鉬(MoS2)與C60組合而成的樣品,在綠光雷射下的拉曼效應(Raman effect)以及光致發光(Photoluminescence PL)的結果,以及其表面形貌;並且藉由改變不同雷射功率,觀察C60的脫附現象(desorption)。
    樣品的製備為利用化學氣象沉積(CVD)在二氧化矽(SiO2)基板上沉積出二硫化鉬(MoS2)薄膜,再利用超高真空鍍膜技術將C60鍍上;利用原子力顯微鏡(AFM)與拉曼效應、光致發光光譜分析對C60/MoS2樣品的表面結構以及半導體性質進行量測。實驗結果發現,改變不同的雷射功率,以及照射時間,可以對C60的光致發光特徵峰造成影響,進而探討雷射對C60造成的脫附現象;實驗中發現使用波長532 nm功率 5 mW的雷射以1分鐘與6分鐘的照射時間,分別可以使樣品造成
    C60的PL峰值以及MoS2的PL峰值的下降,並利用此現象對C60/MoS2異質結構進行微觀圖形的雕製。

    In this study, we deposited C60 films on MoS2 flakes, and investigated the morphology, Raman spectrum and photoluminescence spectrum to study the laser-induced desorption effect on the C60/MoS2 heterostructure. The MoS2 flakes were fabricated on SiO2/Si(100) substrates by using chemical vapor deposition, and the C60 thin film was deposited on the MoS2 flakes by e-beam evaporation.
    By atomic force microscope We found the relationship between the laser power and the surface height of both MoS2 flakes and C60/MoS2 heterostructure. Furthermore, we found that a hole formed on the C60 surface by laser-induced desorption effect. In the photoluminescence spectroscopy analysis, the characteristic peak of C60 also decreased by Increasing the laser irradiation time.
    Finally, through using laser-induced desorption effect, we chose 532 nm laser with power of 5 mW( irradiation time is 1 and 6 min), And we can make the patterns with 4 kinds of photoluminescence waveform on the MoS2/C60 heterostructure.

    目錄 摘要 第一章 緒論 第一節 研究動機與計畫 1 第二章 基本概念與原理 第一節 有機半導體 C60 4 第二節 二維材料 6 第三節 真空系統 7 第四節 拉曼散射 10 第五節 光致發光 13 第三章 實驗儀器 第一節 超高真空系統(Ultra-high vacuum system) 16 第二節 電子束蒸鍍系統(Electron beam evaporation) 18 第三節 拉曼光譜量測系統(Raman spectrometer) 20 第四節 原子力顯微鏡(Atomic Force Microscope) 23 第四章 實驗結果與討論 第一節 樣品製備 28 第二節 MoS2表面形貌分析 30 第三節 C60/MoS2樣品光譜分析 33 第四節 雷射照射結果分析 36 第五節 雷射產生C60脫附現象探討 43 第六節 細微圖像設計應用 45 第五章 總結 48 參考文獻 49

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