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研究生： 林俊誠
Chun-Cheng Lin
論文名稱： 矽上絕緣層矽晶元件應用在光學讀取系統之研究
Study of SOI Devices Applied to Optical Pickup Head Systems
指導教授： 曹士林
Tsao, Shyh-Lin
學位類別： 碩士
Master
系所名稱： 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年： 2005
畢業學年度： 93
語文別： 英文
論文頁數： 101
中文關鍵詞： 矽上絕緣層矽晶 、光學讀取頭 、光子晶體 、光子能隙 、多模干涉 、脊狀波導
英文關鍵詞： SOI, optical pickup head, photonic crystal, PBG, multimode interference, rib waveguide
論文種類： 學術論文
相關次數： 點閱：203  下載：0 
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    • 本文提出利用矽上絕緣層矽晶元件建立光學讀取系統結合多模干涉型光學能隙波導光分歧器及光子晶體Mach-Zehnder結構。我們利用二維光子晶體週期性結構及線狀缺陷的技術並針對不同的能隙結構來控制光在光子晶體波導中行進的路徑，以便達到縮小積體光學元件之體積。多模干涉型光學能隙波導光分歧器是基於自成像現象設計而成。我們利用自成像現象在矽上絕緣層矽晶脊狀光波導設計多模干涉光分歧器並進一步研究自成像現象在光子晶體傳播情形來設計光學能隙波導光分歧器。此外，我們利用六角形晶格光子晶體的Mach-Zehnder結構來達成干涉現象，並藉此設計光學讀寫系統。

    In this thesis, we design optical pickup head system by MMI-based PBG waveguide optical splitter with a square-lattice photonic crystal and Mach-Zehnder structure with a hexagonal-lattice photonic crystal building on SOI wafer. MMI-based PBG waveguide optical splitter with a square-lattice photonic crystal is based on self-image phenomenon. We design the device according to the self-image phenomenon in MMI optical splitter based on SOI rib waveguide. We use the technique of photonic bandgap and line defect to control the direction of the light wave propagation in a waveguide. Besides, Mach-Zehnder structure with a hexagonal-lattice photonic crystal is also used to design as an interferometer.

    Contents Chinese Abstract………………………………………………………i English Abstract………………………………………………………ii Acknowledgment………………………………………………………iii Contents ………………………………………………………………iv List of Figures ……………………………………………………vii List of Tables ……………………………………………………xi Chapter 1 Introduction ………………………………………………1 Chapter 2 Design and Analysis of 1x(2N+1) MMI Optical Splitters Based on SOI Rib Waveguide………………………5 2-1 Introduction of the Technique of SOI Waveguide…………6 2-1-1 Mathematic Formulation of Beam Propagation Method…………7 2-1-2 SOI Single mode Rib Waveguide…………………………10 2-1-3 SOI S-Shaped Waveguide………………………………….12 2-1-4 SOI Directional Coupler including S-Shaped Waveguide…………14 2-2 Introduction of the Technique of MMI Structure…………15 2-2-1 Mathematic Formulation of MMI Structure……16 2-3 Simulation Results of 1x(2N+1) MMI Optical Splitters Based on SOI Waveguide………………………………………………19 2-3-1 1x3 MMI Optical Splitter……………………………………20 2-3-2 1x5 MMI Optical Splitter……………………………………21 2-3-3 1x7 MMI Optical Splitter……………………………………23 2-3-4 1x9 MMI Optical Splitter……………………………………24 2-4 Summary……………………………………………………………26 Chapter 3 Design and Analysis 1x(2N+1) MMI-based PBG Waveguide Optical Splitters………………………………………43 3-1 Introduction of photonic crystals and two-dimensional photonic band gap waveguide………………………………………44 3-2 Mathematical formulation of two-dimensional photonic band gap structure and finite difference time domain method…………………………45 3-2-1 Mathematical formulation of the photonic band gap structure……………………46 3-2-2 Mathematical formulation of finite difference time domain method………………………………………………………48 3-3 Simulation results of 1x(2N+1) MMI-based square lattice PBG waveguide optical splitters…………………………………50 3-3-1 1x3 MMI optical splitter………………………………52 3-3-2 1x5 MMI optical splitter………………………………52 3-3-3 1x7 MMI optical splitter………………………………53 3-3-4 1x9 MMI optical splitter………………………………54 3-4 Summary……………………………………………………………55 Chapter 4 Applications of Optical Pickup Head System………68 4-1 Introduction of the optical pickup head system…………69 4-2 Design and analysis of optical pickup head system based on PBG waveguide with Mach-Zehnder structure…………………69 4-2-1 Original System…………………………………………………70 4-2-2 Improved System………………………………………………71 4-3 Design and analysis of integrated two-dimensional photonic band gap optical pickup head system with MMI-based PBG waveguide optical splitter on SOI wafer…………………72 4-4 Summary……………………………………………………………74 Chapter 5 Conclusions………………………………………………86 Reference………………………………………………………………88 Publication Lists.…………………………………………………xii List of Figures Fig. 2-1 Structure of optical SOI rib waveguide……………28 Fig. 2-2 Simulation results of power propagation and mode pattern of an SOI straight rib waveguide with and without polymer…………………………………………………………………28 Fig. 2-3 Structure of optical SOI S-shaped waveguide………29 Fig. 2-4 Simulation results of power propagation and mode pattern of an SOI S-shaped rib waveguide with and without polymer…………………………………………………………………29 Fig. 2-5 Structure of the whole SOI directional waveguide coupler including S-bend power splitting branches with polymer cover…………………………………………………………30 Fig. 2-6 Simulation results of power propagation and mode pattern of an SOI directional waveguide coupler including S-bend power with and without polymer……………………………30 Fig. 2-7 Structure of MMI devices………………………………31 Fig. 2-8 Multimode waveguide based on Self-imaging…………31 Fig. 2-9 Structure of 1x(2N+1) MMI splitter…………………32 Fig. 2-10 Length variation of MMI waveguide of a 1x3 MMI splitter…………………………………………………………………32 Fig. 2-11 Width variation of MMI waveguide of a 1x3 MMI splitter…………………………………………………………………33 Fig. 2-12 Etched depth variation of rib waveguide of a 1x3 MMI splitter……………………………………………………………33 Fig. 2-13 Response of wavelength of a 1x3 MMI splitter……34 Fig. 2-14 Length variation of MMI waveguide of a 1x5 MMI splitter…………………………………………………………………34 Fig. 2-15 Width variation of MMI waveguide of a 1x5 MMI splitter…………………………………………………………………35 Fig. 2-16 Etched depth variation of rib waveguide of a 1x5 MMI splitter……………………………………………………………35 Fig. 2-17 Response of wavelength of a 1x5 MMI splitter…………………………………………………………………36 Fig. 2-18 Length variation of MMI waveguide of a 1x7 MMI splitter…………………………………………………………………36 Fig. 2-19 Width variation of MMI waveguide of a 1x7 MMI splitter…………………………………………………………………37 Fig. 2-20 Etched depth variation of rib waveguide of a 1x7 MMI splitter……………………………………………………………37 Fig. 2-21 Response of wavelength of a 1x7 MMI splitter…………………………………………………………………38 Fig. 2-22 Length variation of MMI waveguide of a 1x9 MMI splitter…………………………………………………………………38 Fig. 2-23 Width variation of MMI waveguide of a 1x9 MMI splitter…………………………………………………………………39 Fig. 2-24 Etched depth variation of rib waveguide of a 1x9 MMI splitter……………………………………………………………39 Fig. 2-25 Response of wavelength of a 1x9 MMI splitter…………………………………………………………………40 Fig. 2-26 Relation of LMMI and the number of output ports for 1x(2N+1) optical splitter based on SOI rib waveguide………………………………………………………………40 Fig. 2-27 Relation of WMMI and the number of output ports for 1x(2N+1) optical splitter based on SOI rib waveguide…41 Fig. 2-28 Relation of d and the number of output ports for 1x(2N+1) optical splitter based on SOI rib waveguide………41 Fig. 2-29 Relation of input wavelength response and the number of output ports for 1x(2N+1) optical splitter based on SOI rib waveguide………………………………………………………………42 Fig. 3-1 Cartesian grid configuration used to implement the FDTD method……………………………………………………………57 Fig. 3-2 Structure of photonic crystal with a square lattice of Si Rod……………………………………………………57 Fig. 3-3 Gap map for square lattice of Si rod, n=3.5………58 Fig. 3-4 TE band structure at lattice constant a=0.64μm and radius r=0.11μm of Si rod……………………………………58 Fig. 3-5(a) Structure of connection with a single mode waveguide and a multimode waveguide……………………………59 Fig. 3-5(b) Propagation in the connection with a single mode waveguide and a multimode waveguide………………………59 Fig. 3-6(a) Propagation in the connection with a single mode waveguide and a multimode waveguide………………………60 Fig. 3-6(b) Propagation in the 1x3 MMI PBG splitter with LMMI =11a………………………………………………………………………60 Fig. 3-7(a) Structure of connection with a single mode waveguide and a multimode waveguide……………………………61 Fig. 3-7(b) Propagation in the connection with a single mode waveguide and a multimode waveguide………………………61 Fig. 3-8(a) Structure of 1x5 MMI PBG splitter with LMMI =22a………………………………………………………………………62 Fig. 3-8(b) Propagation in the 1x5 MMI PBG splitter with LMMI =22a………………………………………………………………62 Fig. 3-9(a) Structure of connection with a single mode waveguide and a multimode waveguide……………………………63 Fig. 3-9(b) Propagation in the connection with a single mode waveguide and a multimode waveguide………………………63 Fig. 3-10(a) Structure of 1x7 MMI PBG splitter with LMMI =33a……………………………………………………………………64 Fig. 3-10(b) Propagation in the 1x7 MMI PBG splitter with LMMI =33a………………………………………………………………64 Fig. 3-11(a) Structure of connection with a single mode waveguide and a multimode waveguide……………………………65 Fig. 3-11(b) Propagation in the connection with a single mode waveguide and a multimode waveguide………………………65 Fig. 3-12(a) Structure of 1x9 MMI PBG splitter with LMMI =44a………………………………………………………………………66 Fig. 3-12(b) Propagation in the 1x9 MMI PBG splitter with LMMI =44a………………………………………………………………66 Fig. 4-1 Structure of photonic crystal with a hexagonal lattice of Si rod……………………………………………………75 Fig. 4-2 Structure of original system with PBG interferometer 1………………………………………………………75 Fig. 4-3 Optical field distribution of PBG interferometer 1…………………………………………………………………………76 Fig. 4-4 Output field intensity profile of PBG interferometer 1………………………………………………………77 Fig. 4-5 Structure of improved system with PBG interferometer 1………………………………………………………77 Fig. 4-6 Optical field distribution of PBG interferometer 2…………………………………………………………………………78 Fig. 4-7 Output field intensity of PBG interferometer 2…………………………………………………………………………79 Fig. 4-8 Optical field distribution of improved system launched on land region of disk………………………………………………………………………79 Fig. 4-9 Output field intensity of improved system launched on land region of disk………………………………………………80 Fig. 4-10 Optical field distribution of improved system launched on pit region of disk……………………………………80 Fig. 4-11 Output field intensity of improved system launched on pit region of disk……………………………………81 Fig. 4-12 TE band structure for lattice constant a=0.64μm and radius r=0.11μm of Si rod with a hexagonal lattice…81 Fig. 4-13 Structure of our designed optical pickup system based on MMI PBG waveguide…………………………………………82 Fig. 4-14 Optical field distribution of optical pickup system…………………………………………………………………82 Fig. 4-15 Output field intensity of optical pickup system…………………………………………………………………83 Fig. 4-16 Optical field distribution of optical pickup system launched on land region of disk…………………………83 Fig. 4-17 Output field intensity of improved system launched on land region of disk…………………………………84 Fig. 4-18 Optical field distribution of optical pickup system launched on pit region of disk…………………………84 Fig. 4-19 Output field intensity of optical pickup system launched on pit region of disk……………………………………85 List of Tables Table 3-1 Design parameters of 1x(2N+1) optical splitters with square-lattice photonic crystals…………………………67 Table 4-1 FWHM of PBG interferometer 1 [Unit: μm]…………76 Table 4-2 FWHM of PBG interferometer 2 [Unit: μm]…………78

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