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研究生: 柯閎仁
論文名稱: 前瞻性奈米矽柱陣列感測器建構在極化鍵控系統之研究
Study of the Novel Sensor Using Si Nanopillars Array Based on PolSK Fiber-Optic System
指導教授: 曹士林
Tsao, Shyh-Lin
學位類別: 碩士
Master
系所名稱: 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年: 2007
畢業學年度: 95
語文別: 英文
論文頁數: 131
中文關鍵詞: 光子晶體極化分析光感測器生物檢測
英文關鍵詞: photonic crystal, polarization analyzer, optical sensor, technology, biosensor
論文種類: 學術論文
相關次數: 點閱:276下載:0
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  • 本文中我們成功設計並製造出高靈敏光矽柱陣列感測器並利用低成本奈米球微影技術與光輔助電化學離子蝕刻,在本文中的實驗可以證明微小生物分子可以利用極化變化被判別,我們利用生物分子微小的折射率變化引發感測器的強烈極化靈敏度在結合極化鍵控系統來觀察邦加球上極化的改變並判別生物分子,這是個非常有前瞻性的初步實驗,我們相信這個前瞻性的矽柱陣列感測器搭配極化鍵控系統技術應用在生物科技領域上,定可替人類帶來革命性的醫療突破。

    In this thesis, we successfully designed and fabricated optical high sensitive sensor using silicon nanopillars array by low-cost self-assembly nanosphere lithography method to generate high aspect ratio silicon nanopillars by reactive ion etching and photo-assisted electrochemical etching. In the demonstration of the experimentation, small bio-molecules can be judged by monitoring the polarization variation. We distinguish the bio-molecules from the slight different changes of refractive index, which caused sensor strongly polarization variation, and observe signal constellation by Poincaré sphere based on Polarization Shift Keying (PolSK) fiber-optic system, which makes the sensors extremely sensitive to the refractive index slightly changed resulting from the infiltration of bio-molecules. This is a very promising value from this preliminary experiment. We believe this novel sensor using Si nanopillars array based on PolSK fiber-optic system technology can bring revolutionary medical treatment to the mankind.

    Chapter 1 Introduction.....................................1 Chapter 2 Design and Analysis of the Novel Sensor Using Si Nanopillars array-Based Photonic Crystals..................8 2-1 Introduction of the background.........................9 2-2 Introduction Classical Materials forApplication.......10 2-2-1 Introduction of the Sensor..........................11 2-2-2 Advantages of the Sensor Using Si-Nanopillar Array..12 2-3 Principle of the High Sensitive Sensor Using Si-Nanopillar Array..........................................13 2-3-1 Characteristics and Appearance of the Photonic Crystals..................................................14 2-3-2 Theory of the Polarization..........................16 2-3-3 Working Principle of the Sensor Using Si-Nanopillar Array.....................................................20 2-4 Background Theorem of Beam Propagation Method (BPM), Finite Difference Time Domain (FDTD) Method and Plan Wave Expansion (PWE) Method....................................21 2-4-1 Mathematical Formulation of Beam Propagation Method....................................................22 2-4-1-1 Forward Beam Propagation Method...................22 2-4-2 Mathematical Formulation of Finite Difference Time Domain Method.............................................25 2-4-2-1 Mathematical Formulation of Finite Difference Time Domain Method.............................................26 2-4-3 Plan Wave Expansion (PWE) Method....................31 2-5 Compare and Analysis of the High Sensitive Sensor.....33 2-5-1 Compare and Analyze of Various Structures based on Cubic Arranging...........................................33 2-5-2 Compare and Analyze of Various Structures based on Hexagonal Arranging.......................................35 2-6 Summary...............................................37 Chapter 3 Fabrication of the Novel High Sensitivity Sensor Using Si Nanopillars Array................................58 3-1 Introduction..........................................59 3-1-1 Molecular Self Assembly.............................61 3-1-2 photo-assisted electrochemical etching technology ..62 3-2 Flowchart of Sensor Fabrication, and Introduction of Basic Fabrication Process.................................65 3-3 The Experiment Processes and Measurement Results for Integrated Optical High Sensitivity Sensor Using Si Nanopillars Array Devices.................................71 3-4 Summary...............................................73 Chapter 4 PolSK Fiber-Optic System Measured DNA Sensor....84 4-1 Working Principle of the Sensor Using Si-Nanopillar Array Based on PolSK Fiber-Optic System...................85 4-1-1 Introduction of PolSK fiber-optic system............86 4-1-2 Definition of Stokes Parameters、Stokes Parameters and Poincar'e Sphere......................................89 4-2 Introduction of Measure Bio-molecular DNA Samples.....94 4-3Experimental Results of PolSK Communication with the DNA.......................................................98 4-4 Summary..............................................105 Chapter 5 Conclusions....................................117 References...............................................121

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