隨著科技的進步與環保意識的高漲，人類亟需一種乾淨、無汙染的能量來源，以應用於現今生活中不可或缺的可攜式電子產品。直接甲醇燃料電池(direct methanol fuel cell, DMFC)，其具有操作溫度低，啟動速度快，能量密度高，燃料攜帶方便，燃料取得容易等優點。因此，本研究希望將燃料電池微型化(micro DMFC, DMFC)，並簡化其組成元件，降低製造成本，以實現整合於可攜式電子產品中的可能性。為了降低性能優異燃料電池所需的製造成本，本研究以低成本的「TMAH濕蝕刻技術」以及「光輔助電化學蝕刻技術」，製作微型直接甲醇燃料電池雙極板結構。整個研究重點包括：(1)具微流體系統之流場板製作；(2)整合於微流道底部之奈米結構擴散層製備；(3)雙極板白金觸媒層之塗佈；(4)Nafion質子交換膜(PEM)前處理；(5)膜電極組壓合製程；(6)甲醇燃料電池之元件組裝；(7)電池特性檢測與發電效率之評估等項目。
本研究已成功使用「TMAH濕蝕刻技術」製造出深度達250 um之微型流道結構，並於微流道底部直接以「光輔助電化學蝕刻技術」，製作出微米級直徑10-20 um之多孔結構，並在孔洞內利用熱裂解CVD方式成長線徑約為70 nm的奈米碳管。實驗結果顯示，僅具有多孔矽結構之uDMFC，其最大功率為20.2 uW/cm2，以碳紙作為擴散層之對照組的uDMFC，所能輸出的最大功率密度為16.2 uW/cm2，經實驗證明多孔矽實驗組，其最大功率密度已超越碳紙對照組，本研究已成功實現利用多孔矽來取代碳紙擴散層。此外，結合奈米碳管結構之DMFC，其最大功率達到226 uW/cm2，由此可證透由奈米碳管大比表面積及驅除CO2能力的優勢，可將uDMFC的功率密度提升十倍以上。

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