本研究藉由微機電製程技術 (Micro electro mechanical system, MEMS)製作多管柱平行分離氣相微層析晶片 (μ-column)，在微層析晶片內分別塗佈上具有不同選擇性的靜相材料：polydimethylsiloxane (DB-1)、polyethylene glycol (DB-WAX)、trifluoropropylmethylsilicone (OV-210)，利用靜相材料對揮發性氣體 (VOCs) 不同的滯留效果可同步獲得三張層析圖譜。微小化氣相層析儀中利用致冷片對微層析晶片進行控溫，本研究利用致冷片對晶片進行控溫進而達到 0 ℃ 的溫度，使管柱分離效果提升。實驗中探討流速、分流比、溫度對化合物在管柱中分離的影響，並找出實驗最佳條件，提升圖譜分離效果。在最佳條件下進行實驗可以在各管柱長僅 1 公尺的情況下分離 12 種沸點以及極性相異的化合物，並只花費 250 秒的時間。任一化合物在固定實驗參數下進行實驗，可同時獲得三張在不同靜相的層析圖譜，進而得到三組不同的滯留時間，三組滯留時間可作為其定性判斷的依據，協助進行化合物的判別。

We developed a novel three parallel μ-column chip using micro electro
mechanical system (MEMS) process. The chip was coated with three selective
stationary phases : Polydimethylsiloxane (DB-1), Polyethylene Glycol
(DB-WAX) and Trifluoropropylmethylsilicone (OV-210). Taking advantage of
dissimilar retentions for volatile organic compounds (VOCs) of the three
stationary phases, compounds can be separated in parallel separation and three
chromatograms are generated simultaneously. In this study, the thermoelectric
cooler was used to control the temperature program of μ-column chips. The
temperature of μ-column chips can initiate 0 ℃, which makes the compound
separation improved. Therefore, the optimal condition such us flow rate, split
and temperature can enhance the separation. The module can separate complex
mixtures by shorter columns which total traveling lengths in column is only one
meter for each eluted peak. It only takes 250 seconds to separate a mixture of 12
analyses with various volatilities and polarities were demonstrated using an
adaptive GC system with a parallel column chip. Three discrete chromatograms
were generated simultaneously, the researcher can get three retention time of
each compound at once under constant experimental parameter. Three retention
time can judge the qualitative, helping the judgment of volatile organic
compounds.

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