研究生: |
顏澤宇 Ze-yu Yen |
---|---|
論文名稱: |
硼摻雜在偏壓下對鑽石膜沈積的影響 Study on Bias Growth of Boron Doped Diamond Films |
指導教授: | 賈至達 |
學位類別: |
碩士 Master |
系所名稱: |
物理學系 Department of Physics |
論文出版年: | 2004 |
畢業學年度: | 92 |
語文別: | 中文 |
論文頁數: | 80 |
中文關鍵詞: | 鑽石膜 、硼 、偏壓 、拉曼 、場發射 、微波電漿化學汽相沈積 |
英文關鍵詞: | Diamond, Boron, Bias, Raman, field emission, mpecvd |
論文種類: | 學術論文 |
相關次數: | 點閱:198 下載:49 |
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多晶鑽石薄膜之合成法中,偏壓輔助法能夠快而有效的進行鑽石膜沈積,因此受大部分研究者所親睞。偏壓輔助成長鑽石的研究通常偏好於較高負偏壓下奈米鑽石的尺度較多,相關文獻也較齊全,因此本論文主要以較少人討論的低負偏壓輔助成長來作為研究主題,並試圖加入硼摻雜一起討論研究偏壓輔助成長對場發射的影響。
Reference
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[18] 彭國光 清大材科所博士論文