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研究生: 吳佳原
WU, Jia-Yuan
論文名稱: 矽單層在銀/矽(111)-(1x1)薄膜表面上的成長
The growth of silicene on Ag/Si(111)-(1x1) films
指導教授: 傅祖怡
Fu, Tsu-Yi
學位類別: 碩士
Master
系所名稱: 物理學系
Department of Physics
論文出版年: 2015
畢業學年度: 104
語文別: 中文
論文頁數: 68
中文關鍵詞: 掃描穿隧電子顯微鏡矽烯
英文關鍵詞: scanning tunneling microscope, silicene
DOI URL: https://doi.org/10.6345/NTNU202204848
論文種類: 學術論文
相關次數: 點閱:141下載:31
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  • 在本實驗中我們利用液態氮將 Si (111)-7×7 基板降至100 K後,再用K-cell 蒸鍍銀原子於表面,經過熱退火後得到平整的銀薄膜。
    在該薄膜上我們維持一定的溫度蒸鍍矽原子,藉此成長矽單層。在改變不同溫度下蒸鍍矽原子,我們透過掃描穿隧式顯微鏡發現4種不同結構的矽單層,包括4×4、√13×√13-1、√13×√13-2、2√3×2√3,並且發現 4×4 結構在高溫比較容易出現。而在超過 1 ML 的鍍量實驗中我們發現第二層的矽單層和 2×2 的有序排列。
    另外,從低能量電子繞射儀的觀察,發現銀薄膜表面原子排列存在錯位,在這種表面成長矽單層會使得排列方向改變。在排列方向改變的區域存在明顯的邊界或是排列的空缺。

    After depositing silver on Si (111)-(7×7) by k-cell at 100K and annealing the substrate to 300℃,we got the flatten silver films on silicon substrate. We grow silicene on these silver films at different temperature and found four different types of silicene including 4×4、√13×√13-1、√13×√13-2、2√3×2√3 structure by using scanning tunneling microscope . We found that at higher depositing temperature the rate of 4×4 structure would increase .When we deposit more than 1 ML Si atoms,part of Si atoms will form second layer silicene and 2×2 arrangement.
    On the other hand,we found that silver films have dislocations by low energy electron diffraction. Dislocations cause the change of silicene arrangement .The region of arrangement change have obvious boundary or spots absence .

    目錄 摘要 I Abstract II 目錄 III 第一章 緒論 1 第二章 實驗原理與方法 3 2-1 基本原理 3 2-1-1 穿隧效應 3 2-1-2 表面能階 6 2-2 STM操作原理 7 2-2-1 定電流模式 7 2-2-2 定高度模式 8 2-3 LEED與倒晶格 (Reciprocal lattice) 9 第三章 實驗儀器 11 3-1實驗儀器簡介 11 3-2超高真空系統 12 3-3真空幫浦 12 3-4油封式機械幫浦 13 3-5渦輪分子幫浦 13 3-6離子幫浦 15 3-6-1氣體離子化 16 3-6-2鈦金屬濺射與化學結拖 16 3-4-3離子埋入與擴散 17 3-7鈦昇華幫浦 17 3-8真空壓力計 18 3-9蒸鍍系統 19 3-9-1 K-cell蒸鍍槍 19 3-9-2 電子束蒸鍍槍 20 3-10 掃描式穿隧顯微鏡 (STM) 22 3-11 低能量電子繞射儀 25 第四章 實驗流程 26 4-1 STM探針製備 28 4-2矽樣品清潔與處理 31 4-3製備Ag(1×1) 薄膜 32 4-4在Ag(1×1) 薄膜上成長矽單層 33 第五章 實驗數據討論 34 5-1 銀表面排列錯位 34 5-2 矽單層結構整理 36 5-2-1 4×4矽單層 36 5-2-2 √13×√13- 1 矽單層 38 5-2-3 2√3×2√3 矽單層 40 5-2-4 √13×√13- 2矽單層 41 5-3低鍍量矽單層的表面形貌 42 5-4 矽原子鍍量估計 44 5-5 基底溫度對矽單層結構影響 46 5-5-1 於210 ℃ 蒸鍍 0.9 ML矽於銀表面 46 5-5-2 於240 ℃ 蒸鍍 0.9 ML矽於銀表面 48 5-5-3 於270 ℃ 蒸鍍 0.9 ML矽於銀表面 50 5-5-4溫度對結構成長影響小結 52 5-6第二層矽原子排列方式 53 5-6-1 有序排列及矽島 53 5-6-2 多層矽烯結構 56 5-7銀基底排列錯位對矽單層的影響 61 第六章 實驗結論 63 參考資料 65

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