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研究生： 陳念澤
Nien-Tse Chen
論文名稱： 光波導元件間耦合效應之研究
Study of Coupling Effect between Optical Waveguide Devices
指導教授： 曹士林
Tsao, Shyh-Lin
學位類別： 碩士
Master
系所名稱： 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年： 2007
畢業學年度： 96
語文別： 中文
論文頁數： 73
中文關鍵詞： 光波導 、耦合損失
英文關鍵詞： Optical waveguide, Coupling loss
論文種類： 學術論文
相關次數： 點閱：286  下載：31 
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    • 本文主旨在研究光波導元件間耦合損失之參數之變異。首先，我們討論單模光纖對多模光纖的耦合效率，然後探討矽上絕緣層矽晶脊狀光波導對單模光纖與多模光纖的耦合效率，藉以得知光波導元件之耦合損失，接著我們再介紹SOI方形波導元件的製程與元件的光譜特性，藉以得知此元件的物理特性，另外我們同時也討論了不同結構厚度與寬度的元件與光纖的光耦合效率，亦即不同的幾何形狀所產生的耦合效率差異。最後，我們將元件縮小至奈米的尺度，討論在奈米尺度下，光波導元件與光波導元件的光耦合效率會有什麼不同的光學特性。

    In this thesis, we discuss various coupling conditions between optical waveguide devices. We simulate the coupling loss of single mode fiber to multi-mode fiber, analyze optical waveguide based on SOI coupling to single mode fiber, furthermore, consider coupling effect between optical waveguide based on SOI and multi-mode fiber. The introduction of 2x2 Multi-mode Interference (MMI) SOI devices and measurement of photo luminance spectrum of the 2x2 MMI devices are reported. Discussion of coupling loss of different width and slab height of 2x2 MMI devices are also presented. Finally, we minimize the size of 2x2 MMI devices to nano-scale and discuss the coupling loss between nano-scale optical waveguide components and optical film.

    Chapter 1 Introduction …………………………………………...……1 Chapter 2 Simulation and Experiment of Coupling Loss of SMF to MMF and Waveguide to SMF and MMF ……..................................................................……...4 2-1 Introduction…………………………………….....……………………..5 2-2 Simulation Model and Experimental Setup ………………...………......6 2-2-1 Light Acceptance and NA in Optical Fiber………………….........6 2-2-2 Beam Propagation Method (BPM)………………………………..8 2-2-3 Single Mode SOI Rib Waveguide……………………………….12 2-2-4 Experiment Description………………………………………….13 2-3 Simulation and Experimental Results………………….…..……..……14 2-3-1 Coupling Loss of SMF to MMF…………..……………..………15 2-3-1-1 Longitudinal Offset Consideration……………………....15 2-3-1-2 Lateral Offset Consideration…………………………….16 2-3-2 Coupling Loss of 4μm Waveguide to SMF………..…………….17 2-3-2-1 Longitudinal Offset Consideration……………………...17 2-3-2-2 Lateral Offset Consideration…………………………….18 2-3-3 Coupling Loss of 4μm Waveguide to MMF……..………………18 2-3-3-1 Longitudinal Offset Consideration……………………...19 2-3-3-2 Lateral Offset Consideration…………………………….19 2-3-4 Comparison of Coupling Loss of SMF to MMF, 4μm Waveguide to SMF and 4μm Waveguide to MMF…….………………….20 2-3-4-1 Longitudinal Offset Consideration……………………...20 2-3-4-2 Lateral Offset Consideration…………………………….21 2-4 Summary……………………………………………………………….22 Chapter 3 Fabrication and Experiment of Optical Multimode Interference Based on SOI......………………………..30 3-1 Introduction of Optical Waveguides Based on Silicon-on-Insulator Wafer…………………………………………………………………...31 3-2 Flowchart of Semiconductor Process of Fabricating Optical 2x2 MMI Device………………………………………………………………….32 3-3 Reflected Spectrum of Optical 2x2 MMI Device…...…........................39 3-3-1 Reflected Spectrum of Optical 2x2 MMI Device……………….39 3-3-2 Photo-Luminescence (PL) Spectrum of Optical 2x2 MMI Device………………………………………………………..…40 3-4 Simulation Results of Coupling Loss of 2x2 MMI Device to SMF…...42 3-4-1 Mathematic Formulation of MMI Structure…………………….42 3-4-2 Simulation Results of Coupling Loss of 2x2 MMI Devices to SMF……………………………………………………………..44 3-5 Summary……………………………………………………………….46 Chapter 4 Simulation of Coupling Loss of Minimized Optical Waveguide Components …............................................53 4-1 Introduction of nano-scale devices...……………...................................54 4-2 Simulation of Coupling Loss of Nano-Fiber...………............................54 4-3 Simulation of Coupling Loss of Minimized 2x2 MMI based on SOI….56 4-4 Summary……………………………..…….…………..……...…….…61 Chapter 5 Conclusions………………………………..........…………72 reference 74

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