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研究生: 黃昱綸
Huang, Yu-Lun
論文名稱: 通電作用對氧化鋅薄膜微結構之影響
Effect of applying electrical curent on the microsture of ZnO thin films by sol-gel process
指導教授: 程金保
Cheng, Chin-Pao
學位類別: 碩士
Master
系所名稱: 工業教育學系
Department of Industrial Education
論文出版年: 2010
畢業學年度: 98
語文別: 中文
論文頁數: 85
中文關鍵詞: 溶膠凝膠法氧化鋅薄膜電場效應電遷移
英文關鍵詞: sol-gel method, ZnO thin films, electric field effect, Electromigration effect
論文種類: 學術論文
相關次數: 點閱:154下載:9
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  • 本論文中,使用溶膠凝膠法中之旋轉塗佈法製備氧化鋅非晶質薄膜材料,並鍍在鋁電極與玻璃基板上,分別就三種不同觀點探討 (1) 常溫下利用電場效應對氧化鋅薄膜改質之探討,(2) 不同退火溫度下施加電場對氧化鋅薄膜之影響,以及(3)常溫下金屬電極通電後對氧化鋅薄膜之影響。再分別藉由改變以上三種不同方式之研究參數,如電壓大小、正負偏壓、時間等條件,對製備完成的氧化鋅薄膜試片進行SEM、XRD、XPS等驗證方式探討。經實驗結果之比對,隨著實驗時間的增加,對氧化鋅薄膜施加不同電壓以及電場的控制,可有效的改變氧化鋅薄膜退火後之微結構形貌與特性。除此之外,金屬層因焦耳熱及電遷移作用下產生發熱的現象,導致氧化鋅薄膜表面微結構與結晶產生變化。

    In this paper, we try to obtain crystalline texture within ZnO under room temperature with different electrical field and current. We fabricate ZnO thin film on glass substrate on which aluminum electrodes are evaporated by Sol-Gel spin coating technique at first. Then all specimens are divided into three sets which are respectively treated with different experimental design method for following observation (1) How to improve the quality of ZnO thin films by applying electrical field on them under room temperature. (2) The comparison of applying electrical field over ZnO thin films under different annealing temperatures (3) the effect of electrode which conducts electricity to ZnO thin films. Finally, specimens with different experimental parameters, such as voltages, forward or negative bias and time of applying voltage are investigated with SEM(Scanning Electron Microscope), XRD and XPS. After analyzing experimental results, we know that applying electrical field of different magnitudes over ZnO thin films apparently changes the micro-structure and characteristics of ZnO thin films after annealing as experimental time increases. Besides, that metal layer heats up due to electromigration changes the micro-structure and crystalline texture of ZnO thin films surface.

    目錄 中文摘要 I Abstract II 致謝 III 目錄 V 表目錄 VIII 圖目錄 IX 第一章 緒論 1 1-1 前言 1 1-2 研究動機與目的 3 第二章 理論與文獻探討 5 2-1 溶膠凝膠法(sol-gel method) 5 2-1-1 溶膠凝膠法之原理 9 2-1-2 起始原料的選擇 10 2-1-3 覆膜方式 12 2-1-4 溶膠凝膠法之主要影響參數 15 2-1-5 低溫焦化熱處理 16 2-1-6 高溫結晶熱處理 17 2-2 氧化鋅薄膜之結晶特性 18 2-3 電遷移理論 21 2-3-1 電遷移原理 21 2-3-2 熱焦耳效應 24 2-4 文獻中有關材料施加電場與通電熱處理的相關研究 24 第三章 實驗方法與步驟 28 3-1 實驗藥品與儀器設備 28 3-1-1 實驗儀器 28 3-1-2 實驗藥品與耗材 29 3-2 實驗前置作業 30 3-2-1 前驅物配製 30 3-2-2 基材清洗流程 30 3-2-3 電極製作 32 3-2-4 旋轉塗佈法(spin coating)覆膜 33 3-3 實驗流程規劃 35 3-3-1 常溫下利用電場效應對氧化鋅薄膜改質之影響 38 3-3-2 不同退火溫度下施加電場對氧化鋅薄膜之影響 38 3-3-3 常溫下金屬電極通電後對氧化鋅薄膜之影響 39 3-4 薄膜特性分析 43 3-4-1 掃描式電子顯微鏡觀察 (Scanning Electron Microscope, SEM) 43 3-4-2 X光繞射分析儀 (X-ray Diffraction, XRD) 43 3-4-3 X光電子能譜儀 (X-ray Photoelectron Spectroscope, XPS) 44 3-4-4 四點探針 ( Four-point Probe) 45 第四章 結果與討論 49 4-1 常溫下利用電場效應對氧化鋅薄膜改質之探討 49 4-1-1 常溫電場效應之表面微結構分析 50 4-1-2 常溫下施加電場之XRD分析 59 4-2 不同退火溫度下施加電場對氧化鋅薄膜之影響 60 4-2-1 加熱同時施加電場之表面微結構圖 60 4-2-2 加熱同時施加電場之XRD分析 66 4-3 常溫下金屬電極通電後對氧化鋅薄膜之影響 69 4-3-1 常溫下金屬電極通電後之表面微結構分析 69 4-3-2 常溫下金屬電極通電後之XRD分析 73 4-3-3 X光電子能譜儀(XPS)分析 74 第五章 結論 76 5-1 結論 76 5-2 未來展望 77 第六章 參考文獻 78

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