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研究生: 洪舜文
Hong, Shun-Wen
論文名稱: 微小化氬氣電漿放射光譜應用於氣相層析偵測器之開發
A Gas Chromatographic Detector Employing Argon μ–plasma Emission spectrometry
指導教授: 呂家榮
Lu, Chia-Jung
學位類別: 碩士
Master
系所名稱: 化學系
Department of Chemistry
論文出版年: 2017
畢業學年度: 105
語文別: 中文
論文頁數: 82
中文關鍵詞: 氬氣電漿常壓電漿揮發性有機氣體氣相層析放射光譜
英文關鍵詞: Argon plasma, Atmospheric pressure plasma, Volatile organic compiunds, Gas cgromatograph, Emission spectroscopy
DOI URL: https://doi.org/10.6345/NTNU202202555
論文種類: 學術論文
相關次數: 點閱:112下載:27
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  • 本研究使用石英管及市售不鏽鋼管柱製作簡易電漿裝置,透過高壓交流電激發背景氣體氬氣產生電漿,配合光譜儀分析氬氣電漿的放射光譜,透過波長選擇、電壓條件最佳化、電極間距最佳化及載流氣體流速最佳化後,偵測CN分子碎片放光波長385-387 nm,調整電壓10.3 kV,電極間距0.57 mm,載流氣體流速3 mL/min。分析9個不同官能基之化合物,可以從結果推斷本研究所開發之偵測器適合偵測低沸點低極性的有機分子,各化合物的偵測下限約為30 pg,本研究亦透過改變載流氣體純度及改變載流氣體的組成探討電漿內的氮原子來源,當氬氣純度從99.99%提升至99.9995%,層析圖訊號面積下降約8%、訊號高度下降約14%,表示載流氣體可能為氮原子的來源之一,但並非主要來源。透過在電漿裝置內混入氧氣及氫氣的實驗結果中,混入氧氣後氮原子會和氧氣反應,致使有機分子主要以氫原子放光為主,大幅降低了偵測器感度,而從混入不同百分比的氫氣後,可以看出氫氣會和氮原子反應而消耗氮原子,致使CN放光減弱,間接證明了本研究所偵測的波長為CN放光。
      本研究成功研發出新型電漿氣體偵測器,兼具裝置微小、成本低廉、可重複使用、壽命長及高靈敏度等優點,期許未來能應用於微小化氣相層析系統。

    In this study, we develop a micro plasma sensor using quartz tube and commercial alloy column. Alloy column served as electrodes and gas inlet / outlet. Take advantage of spectroscope, we can analysis argon micro plasma emission spectroscopy for the detection of the volatile organic compounds. We selected wavelength in 385-387 nm which is CN emission, applied voltage was set to 10.3 kV, electrode gap was 0.57 mm, the carrier gas flow rate was 3 mL/min after optimization. We analyzed 9 different kinds of functional group compounds, the sensor exhibited higher sensitivity in low boiling point and polarity compounds. The lower limit of detection of those 9 different compounds was about 30 pg and the linear dynamic range of calibration curve was 2 orders (1-100 ng). We also switch the argon gas from 99.99% to 99.9995% in order to find out the source of the nitrogen atom. The peak area and height were only reduced 8% and 14%, respectively. The result demonstrated that the impurity of argon gas may be the one of possible nitrogen sources, but not the major one. The experiment with modifying the composition of background gas, we added up 10% of oxygen gas and 0.5-10% of hydrogen gas. The result indicated that the carbon containing species transform into CN in plasma system indirectly.
      We construct a micro argon plasma detector which is low cost and long lifetime. With appropriate improvement it can be applied for micro gas chromatograph system.

    謝誌 i 摘要 ii ABSTRACT iii 目錄 iv 圖目錄 vi 表目錄 ix 第1章 緒論 1 1.1 前言及研究動機 1 1.2 Savitzky–Golay數據平滑處理 3 1.3 電漿性質 7 1.4 常壓電漿之分類 9 1.5 電漿游離機制 13 1.6 電漿在產業的應用 15 1.7 文獻回顧 19 第2章 研究方法 23 2.1 實驗藥品、器材及儀器 23 2.1.1 實驗藥品 23 2.1.2 實驗器材 24 2.1.3 儀器設備 25 2.2 光譜式電漿偵測器的製作 26 2.3 氣體樣品配製 29 2.4 LabVIEW人機介面撰寫 31 2.5 實驗系統 36 第3章 結果與討論 38 3.1 偵測波長選擇 38 3.2 電壓條件最佳化 44 3.3 電極間距最佳化 48 3.4 流速條件最佳化 52 3.5 不同官能基之化合物檢量線 57 3.6 不同官能基之化合物偵測下限 61 3.7 提高載流氣體氬氣之純度 63 3.8 改變載流氣體組成的影響 67 3.8.1 添加氧氣 67 3.8.2 添加氫氣 70 3.9 電漿偵測器對乙腈之感度及反應機制探討 75 第4章 結論 78 參考文獻 79

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