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研究生: 羅智鴻
Chih Hung Lo
論文名稱: 氧化鋅奈米光碟片的製作與量測研究
Fabrication and Measurement of Nano Zinc Oxide Optical Recording Disks
指導教授: 蔡定平
Tsai, Din-Ping
學位類別: 碩士
Master
系所名稱: 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年: 2007
畢業學年度: 95
語文別: 中文
論文頁數: 79
中文關鍵詞: 氧化鋅近場光碟片相變化材料紀錄點光儲存穿透光譜載子雜訊比
英文關鍵詞: ZnO, near-field, optical disk, phase-change material, recording mark, optical storage, optical transmittance, CNR
論文種類: 學術論文
相關次數: 點閱:168下載:9
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  • 在本論文中,首先以光碟測試機量測不同厚度與不同氬氧比例的氧化鋅(ZnOx)近場超解析結構光碟片的載子雜訊比(CNR ,Carrier to Noise Ratio),在光學的解析極限下,可以量測寫入長度100nm的記錄點,其載子雜訊比可達到27.97 dB。為了更進一步了解氧化鋅奈米膜層結構中光與膜層的交互作用,我們分層去做探討,利用光譜顯微儀與掃描式電子顯微鏡(SEM)與原子力顯微鏡(AFM)來觀察氧化鋅奈米薄膜的變化。也利用靜態測試儀(pump-probe laser system)量測在不同時間下雷射功率在氧化鋅奈米膜層上所造成的影響,並比較獲得的CCD影像與穿透式電子顯微鏡(TEM)圖。

    In this thesis, we first measure the carrier to noise ratio (CNR) of different thickness and different Ar/O2 flow ratio of ZnOx near-field structure optical recording discs by DVD driver tester. Within the resolving limit of optics, the best CNR about 27.97dB at the recording marks of 100nm can be measured. In order to do justice to the optical interactions on ZnOx nano thin films, we analyze with the layers and make use of spectral photometer, scanning electron microscope (SEM), and transmission electron microscope (TEM) to observe the transformation of ZnOx nano thin films. The power dependence and response time of the optical reaction are measured by an optical static tester, and compare the CCD images and TEM images.

    第一章、 緒論 1-1 前言……………………………………………………………1 1-2 光儲存媒體簡介與光碟工作原理……………………………2 1-3 相變化(phase change)材料的性質………………………6 1-4 奈米近場光學存儲之原理與發展……………………………9 第二章、 實驗儀器架構與基本原理 2-1 鍍膜儀器設備與氧化鋅奈米光碟片的製作…………………17 2-1-1 濺鍍機(Sputter)簡介 2-1-2 濺鍍機之周邊配件 2-1-3 濺鍍原理 2-1-4 氧化鋅奈米光碟片的製作 2-1-5 製作過程中濺鍍率量測與討論 2-1-6 氧化鋅奈米薄膜簡介 2-2 光碟測試機……………………………………………………31 2-2-1 光碟測試機設備架構 2-3 電子顯微鏡……………………………………………………35 2-3-1 掃描式電子顯微鏡(Scanning Electron Microscope,SEM) 2-3-2 穿透式電子顯微鏡 (Transmission Electron Microscope, TEM) 2-4 靜態測試儀……………………………………………………39 2-5 光譜儀…………………………………………………………41 2-5-1 平行光室溫光譜儀器設備 2-5-2 平行光室溫光譜實驗流程 2-5-3 聚焦變溫光譜 第三章、 實驗結果與討論 3-1 光碟測試機實驗結果…………………………………………45 3-1-2 不同氬氧比例氧化鋅近場超解析光碟片CNR值量測 3-2 光譜儀實驗結果………………………………………………53 3-2-1 Perkin Elmer光譜儀量測結果 3-2-2 Leica光譜儀量測結果 3-3 靜態測試儀量測結果…………………………………………62 3-4 電子顯微鏡實驗結果…………………………………………66 3-4-1 穿透式電子顯微鏡(TEM)量測結果 3-4-2 掃描式電子顯微鏡(SEM)量測結果 第四章、 結論………………………………………………………74 參考文獻……………………………………………………………75

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