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研究生: 楊弘意
HONG-YE,YANG
論文名稱: 複合式精微工具機開發與應用
Development and application of the hybrid precision-miniature machine tool
指導教授: 陳順同
Chen, Shun-Tong
學位類別: 碩士
Master
系所名稱: 工業教育學系
Department of Industrial Education
論文出版年: 2010
畢業學年度: 98
語文別: 中文
論文頁數: 108
中文關鍵詞: 複合式工具機微高速銑削微放電加工微線切割放電加工微量測自動化光學檢測臨界接觸量測
英文關鍵詞: Hybrid machine tool, micro high-speed milling, micro EDM, micro w-EDM, micro measurement, automatic optical inspection (AOI), critical contact measurement (CCM)
論文種類: 學術論文
相關次數: 點閱:170下載:20
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  • 本研究旨在開發、設計及製造一部「複合式精微工具機」,並應用此部微型工具機進行微製造技術的開發、研究與驗證。此精微工具機結合「機、電、光」製造技術於系統上,主要用於微型模具、微型刀具、微型零件、微型結構與微型量具的開發製造與應用。為達複合製造目的,文中提出「線上微製造」的技術,透由改變工作槽與製程調整,使工件安置後,至加工完成前都不需拆卸,所以工件沒有定位誤差問題。在精微工具機開發的過程,本研究將微型放電加工、微型線切割放電加工、同心微孔放電與微量測等技術加入系統設計,並融入微型高速銑削與微型研削等精密技術,以單一製程技術及複合製程技術呈現。單一技術包括高速微型銑削,用於微型陣列非球面模具的製造;微型放電銑削以直徑20 µm的微細電極,於直徑1 mm鎢鋼球上,進行曲面字型的創成加工,呈現本研究對複雜3D微模穴的製造能力;微線切割放電加工,本研究以線徑13 µm的微細鎢線,切割微型感測元件與台北101的微縮建物;複合製程技術結合「同心放電鑽孔」與「微鑽研技術」,於工具機上成型一微細鑽研刀具,並成功應用於石英玻璃的鑽研加工。在微量測技術方面,以臨界接觸量測與光學量測比較方式,建構線上微量測與補償再加工的技術,量測精度可達本研究所開發的複合式精微工具機之定位精度。

    The main purpose of the thesis is to develop a hybrid precision-miniature machine tool which combines mechanical, electric with optical manners to use in the fabrication of micro parts, tools and moulds. An on-machine micro fabrication technique, by which a designed exchangeable working table is employed, is proposed to precisely machine the workpiece. Two species of processes, single and hybrid fabrication techniques are created on the developed machine tool. The single process comprising the micro high-speed milling, micro EDM, micro w-EDM, and micro measurement, while the hybrid processes include the co-centric micro-hole drilling-grinding and micro EDMilling techniques. Some machining examples, such as the multi-level aspheric micro lens mould array machining by micro end milling cutter, micro comb electrode cutting and microform of Taipei-101 making using ψ13 µm tungsten wire, as well as micro hole drill-grinding on optical glass by micro diamond tool are successfully fabricated and verified. Two measurement-assisted approaches, automatic optical inspection (AOI) and critical contact measurement (CCM) are also developed and used in accurate compensating and re-machining via micro EDM. By applying the on-machine measurement-assisted, the measuring accuracy is experimented and arrived within the positional accuracy of the developed hybrid machine tool. A micro 3-D engraving mould on a small steel ball of 1-mm diameter and a micro probe with 30 µm in diameter are perfectly fabricated, respectively. The micro tool or part does not be reloaded and readjusted until all planned tasks are completed once the workpiece is mounted on the machine table, therefore the machining accuracy is improved and the machining performance is raised also. Experimental results confirmed that the developed hybrid machine tool can manufacture impeccably and commercialize worthily for contributing to the precision industry.

    中文摘要 I 英文摘要 II 總目錄 III 圖目錄 VII 表目錄 XIV 符號表 XVI 第一章 緒論 1.1前言 1 1.2文獻回顧 2 1.2.1微製造技術的定義 2 1.2.2微型工具機的發展與回顧 4 1.2.3精微製造技術的發展與回顧 6 1.3研究動機與目的 11 1.4研究方法 12 1.5論文架構 13 第二章 精微複合工具機系統開發 2.1結構設計 14 2.1.1結構形變分析 15 2.1.2主機頭座設計 16 2.2替換式工作槽設計 18 2.3刀具位移系統與主軸設計 19 2.4加工油系統設計 20 2.5零組件加工、組裝與校正 21 2.6精微工具機之功能模式規劃 22 2.7結果與討論 23 2.8本研究所用檢驗設備 24 第三章 單製程功能開發 3.1高速微銑削加工技術建構 26 3.1.1微銑削定義與高速精微銑削26 3.1.2高速主軸精密定位設計 27 3.1.3刀具精密定位的方法 28 3.1.4功能驗證 29 (a). 非球面陣列微模具設計 29 (b). 冷卻條件選用 31 (c). 切削路徑比較 32 (d). 最小扇形誤差實驗 33 (e). 微銑削之進給速度選用實驗 34 3.1.5非球面陣列微模具開發驗證 35 3.1.6結果與討論 36 3.2微放電加工技術建構 39 3.2.1微放電加工原理 39 3.2.2微放電迴路設計 41 3.2.3微放電工作槽設計 42 3.2.4電極消耗率與補償實驗 43 3.2.5功能驗證 46 (a).微細電極製作 46 (b).微放電銑削實驗 46 3.2.6結果與討論 48 3.3超細線切割放電加工機能建構 49 3.3.1多向式微型超細線切割放電加工機構設計 49 3.3.2微細線切割加工之進給控制 50 3.3.3超細線的制振策略 51 3.3.4超細線的張力控制 52 3.3.5線張力與切割槽寬之比較 53 3.3.6放電能量、進給速度與切割槽寬關係實驗 56 3.3.7功能驗證 57 (a).超細線切割放電加工試驗 57 (b).應用-微型感測元件製作 60 3.3.8結果與討論 61 3.4線上微量測機能建構 63 3.4.1線上臨界接觸式微量測原理 63 3.4.2線上臨界接觸式量測實驗 64 (a).量測探針進給的方法 64 (b).最低門檻電壓(VT)實驗 66 (c).理想量測電壓(VM)實驗 67 3.4.3線上自動化光學檢測機能建構 71 3.4.4 AOI非接觸式量測實驗 71 (a).光學檢測系統設計 72 (b).光學檢測介面開發 73 (c).影像辨識流程 74 (d).尺寸誤差補償方法 75 3.4.5量測機能驗證 76 (a).直徑30 µm微球探針製作 76 (b).平坦度微量測 78 3.4.6結果與討論 79 第四章 複合製造技術開發 4.1微放電與微鑽研複合加工原理 81 4.2同心孔放電機構設計 82 4.2.1同心放電鑽孔原理 82 4.2.2倒置式放電鑽孔機構 83 4.2.3銅管電極拘束機構設 84 4.2.4放電鑽孔之加工能量決定 85 4.2.5放電鑽孔進給速度選用 86 4.2.6鑽研磨棒刀具之同心孔實驗 87 4.2.7鑽研磨棒刀具之負角設計 88 4.3石英玻璃之細孔鑽研功能驗證 89 4.3.1刀具負角設計對石英玻璃鑽削的影響 90 4.3.2刀具同心孔設計對石英玻璃鑽削的影響 91 4.3.3犧牲材料對孔緣崩落之影響比較 92 4.3.4應用-石英玻璃的成型孔加工 93 4.4結果與討論 94 第五章 總結 5.1研究成果與貢獻 96 5.2未來展望 97 參考文獻 98 附錄 A. 已發表期刊論文 106 B. 個人簡歷 108

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