研究生: |
張峻銘 |
---|---|
論文名稱: |
精密電鑄應用於微圖化耐高溫彩色濾光片製程開發 Micor-patterning of color filter for high-temperature application using electroforming technology |
指導教授: |
楊啟榮
Yang, Chii-Rong 江政忠 Jaing, Cheng-Chung |
學位類別: |
碩士 Master |
系所名稱: |
機電工程學系 Department of Mechatronic Engineering |
論文出版年: | 2006 |
畢業學年度: | 94 |
語文別: | 中文 |
論文頁數: | 143 |
中文關鍵詞: | 彩色濾光片 、黃光微影 、精密電鑄 、電子槍蒸鍍 、光學偵測器 |
英文關鍵詞: | color filter, photolithography, electroforming, E-gun evaporation, optical sensor |
論文種類: | 學術論文 |
相關次數: | 點閱:172 下載:0 |
分享至: |
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
摘 要
由於科技日新月異,輕、薄、短、小、精已成為產品主流趨勢,光電系統中的光學薄膜微圖化製程技術的需求也日益增加。在目前的顯示技術中,彩色濾光片微圖化製程,都是使用印刷、染料或顏料的塗佈技術,不過此技術的最大缺點是染料或顏料的耐熱度較低,工作時不能承受太高的溫度,這對使用高流明的顯示技術將是一大問題。且染料或顏料是以吸收可見光不同波段的方式來呈現色彩,這將會損耗較多的能源或需要更高流明的燈泡。再加上染料或顏料的色彩已固定,如果設計不同的顯示顏色需求,將必須重配染料或顏料的成份組成,這是一件很困難的工作。因此本研究鑒於這些缺點,將結合「黃光微影」、「精密電鑄」與「電子槍蒸鍍」技術,用以製作一微圖化可耐高溫的彩色濾光片,其具有高光穿透性、高解析度、色度純、化學穩定度高以及可耐高溫的彩色濾光片。這樣的製作方式與IC製程的相容性高,可以迅速地被加入相關產業應用,並用於投影機、光學偵測器或生醫檢測方面以及其他光學的應用。
實驗的結果證實以金屬取代厚膜光阻,當作薄膜製鍍時的金屬遮罩,用以定義光學薄膜的微圖案。並完成製鍍直條紋與馬賽克圖案排列,線徑寬度為20 m的R與B波段濾光片,以及量測薄膜的光穿透率,其平均穿透率 達90 %以上。証實了本研究所開發的製程,可成功製作微圖化的光學介質膜。
關鍵詞:彩色濾光片、黃光微影、精密電鑄、電子槍蒸鍍、光學偵測器
Abstract
There is an increasing need on fabricating optic films with micro-pattern for optoelectronic devices. Dispersion methods, such as dyeing, pigment and printing, are currently used in preparing color filters for display technology. However, bad thermal stability of manufacturing coating materials is a great challenge for high-luminant displays. In this study, we used photolithography to define the growth of Ni films by electroforming. The Ni films can be used to replace photoresist as mask to selectively deposit optical films by E-gun evaporation. Straight and mosaic patterns are chosen as arrangements of R, B and G color films. The average light transmittances of the color films are larger than 90 %. The experimental results show that the process can be used to fabricate optical films with desired micro-patterning. We have successfully demonstrated the use of photolithography, electroforming and E-gun evaporation technologies to fabricate chemically and thermally stable micro-patterned optical films with high light transmittance, resolution and color purity. Because of good compatibility with IC manufacturing process, our method can be quickly adapted in applications of projector, optical sensor and bio-inspection.
Keywords:color filter, photolithography, electroforming, E-gun evaporation, optical sensor
參考文獻
1. 紀國鐘等人, "液晶顯示器技術手冊", 台灣電子材料與元件協會, 第四章, pp. 169-214 (2003).
2. 科技產業資訊室, "我國平面顯示器(FPD)產業產值達1711.2億台幣", 財團法人國家實驗研究院科技政策研究與資訊中心, 04-29 (2004).
3. 陳鈺坤, "面板的運轉Color-彩色濾光片", 產經資訊, 第19期, pp. 36-42 (2004).
4. 楊啟榮等人, "微機電系統技術與應用", 精密儀器發展中心, 第四章, pp. 142-230 (2003).
5. 江政忠等人, "真空技術與應用", 精密儀器發展中心, 第十三章, pp. 369-389 (2001).
6. T. Takahashi, H. Nakabayashi, and W. Mizuno, "Effects of plasma exposure on structural and optical properties of TiO2 films deposited by off-axis target sputtering", Journal of Vacuum Science Technology, Vol. 20, Issue 6, pp. 1916-1920 (2002).
7. J. R. Mcneil, G. A. Al-Jumaily, K. C. Jungling, A. C. Barron, "Properties of TiO2 and SiO2 thin films deposited using ion assisted deposition", Applied Optics, Vol. 24, Issue 4, February 15, pp. 486-489 (1985).
8. C. C. Ting, S. Y. Chen, and D. M. Liu, "Preferential growth of thin TiO2 films upon thermal oxidation of sputtered Ti tilms", Thin Solid Films 402, pp. 290-295 (2002).
9. M. J. Colgan, B. Djurfors, D. G. Ivey, and M. J. Brett, "Effect of annealing on titanium dioxide structured films", Thin Solid Films 466, pp. 92-96 (2004).
10. T. J. Swirbel, P. M. Dunn, and J. Barreto, "Color filter for a liquid crystal display ", U.S. patent No. 5,695,690 (1997).
11. 溫俊祥等人, "電著法在Color filter on TFT array上的應用", 工業材料,第169期, pp. 100-105 (2001).
12. 蕭安政等人, "TFT-LCD玻璃基材的介紹", 工業材料,第162期, pp. 115-128 (2000).
13. R. W. Sabnis, "Color filter technology for liquid crystal displays", Displays, Vol. 20, No. 3, pp. 119-129 (1999).
14. T. Sawada, H. Hoshi, H. Endo, M. Tani, M. Sakagawa, T. Sugiura, and M. Yonezawa, "Color filter from multicolor liquid crystal display panel and process of fabricating such color filters ", U.S. patent No. 5,232,634 (1993).
15. M. Tani, and T. Sugiura, "LCD color filters: characteristics and future issues", Soc. Inform. Displays Lect, Notes, pp. F5.1-F5.23 (1995).
16. M. Tani, and T. Sugiura, "Progress in color filters for LCDs", Proc. IDRC, pp. 103–111 (1994).
17. E. Elizur, D. Gelbart, "Printing methods for flat-panel display manufacturing ", Journal of Graphic Technology, Vol. 1, No. 2 pp. 1-5 (2003).
18. 陸文豪, "彩色濾光片材料技術", 財團法人自強工業科學基金會, pp.142-196 (2005).
19. R. W. Wake, S. L. Reithel, and H. G. McGuckin, "Color filter array", U.S. patent No. 4,876,166 (1989).
20. H. Kawabata, K. Koyabashi, and H. Sato, "Photocurable and dyeable resin composion with bisazide and dyeable acrylic copolymer", U.S. patent No.4,943,512 (1990).
21. A. Karasawa, and H. Itoh, "Color filter having novel dyestuffs", U.S. patent No. 5,773,172 (1998).
22. T. J. Swirbel, P. M. Dunn, and J. Barreto, "Color filter for a liquid crystal display", U.S. patent No. 5,695,690 (1997).
23. T. Sawada, H. Hoshi, H. Endo, M. Tani, M. Sakagawa, T. Sugiura, and M. Yonezawa, "Color filter from multicolor liquid crystal display panel and process of fabricating such color filters", U.S. patent No. 5,232,634 (1993).
24. M. Suginoya, K. Iwasa, H. Kamamori, Y. Sano, Y. Terada, N. Kato, T. Suzuki, J. Yasukawa, T. Nomura, K. Tohda, and S. Itoh, "Color member having electrodeposited color layer composed of polymer and coloring matter bonded to polymer and method for manufacturing same", U.S. patent No. 4,781,444 (1988).
25. T. Schimizu, and K. Koyabashi, "Color filter", U.S. patent No. 4934791 (1990).
26. T. Schimizu, and K. Koyabashi, "Colored filter element containing layers of polymerizable compositions", U.S. patent No. 5,085,973 (1992).
27. M. Sato, and T. Sugiyama, "Method for forming a color filter", U.S. patent No. 5,693,436 (1997).
28. M. Sato, M. Iwasaki, and T. Sugiyama, "Process of forming a colored partial picture element and light shielding, light sensitive resin composion used thereof", U.S. patent No. 5,489,621 (1996).
29. C. W. Mclaughlin, "Progress in projection and large-area displays", Proceedings of the IEEE, Vol. 90, No. 4, pp. 521-532 (2002).
30. J. A. Shimizu, "Scrolling color LCOS for HDTV rear projection", SID Symposium Digest of Technical Papers, Vol. 32, Issue 1, pp. 1072-1075(2001).
31. D. S. Dewald, S. M. Penn, and M. Davis, "Sequential color recapture and dynamic filtering:A method of scrolling color", SID, pp. 1076-1079 (2001).
32. P. F. Van Kessel, L. J. Hornbeck, R. E. Michael, and R. Douglass, "A MEMS-base projection Display, Proceedings of the IEEE, Vol. 86, No. 8, pp. 1687-1704 (1998).
33. M. J. Hanrahan, and N. Y. Rochester, "Lift-off process for patterning dichroic filters", U.S. patent No. 5,120,622 (1992).
34. P. E. Buchsbaum, "Method for making dichroic filter array", U.S. patent No. 5,711,889 (1998).
35. P. E. Buchsbaum, and M. J. Morris, "Method for making monolithic patterned dichroic filter detector array for spectroscopic imaging", U.S. patent No. 6,638,668 B2 (2003).
36. 林浪津等人, "微圖化光學膜製程技術", 工業材料, 第209期, pp. 105-112 (2004).
37. 李正中, "薄膜光學與鍍膜技術", 藝軒圖書出版社, 第四版, pp. 1-6 (2004).
38. 林敬二等人, "英、中、日化學大辭典", 高立圖書有限公司, pp.354 (2001).