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研究生: 朱麒宇
論文名稱: 精微電加工法開發內皮層陣列腦波探針研究
Development of a penetrating intra-cortical probe array by using micro electro-machining
指導教授: 陳順同
學位類別: 碩士
Master
系所名稱: 機電工程學系
Department of Mechatronic Engineering
論文出版年: 2014
畢業學年度: 102
語文別: 中文
論文頁數: 128
中文關鍵詞: 內皮層陣列腦波探針複合式精微電加工螺旋式放電加工鍍銀技術腦波波形
論文種類: 學術論文
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  • 本研究旨在針對擷取腦波訊號的內皮層陣列探針,提出一種複合式精微電加工(Hybrid micro electro-machining)的製程技術,此項技術包含兩部分:螺旋式放電加工(Spiral EDM)及鍍銀技術(Silver plating)。研究之初,以外徑ψ300μm碳化鎢棒材,對鉻銅(Cu-Cr)棒材進行螺旋式微孔放電,製成具陣列式微孔電極。再令鉻銅電極倒置夾持,對黃銅(Brass)電極(腦波探針素材)進行螺旋式放電,透由電極搖動、啄鑽運動與一系列精微放電加工參數的實驗,以獲得精確的內皮層陣列腦波探針,探針之尺寸規劃為:5×5陣列針數、探針高度350μm、探針尖端外徑50μm、探針錐率1:7。由實驗得知,採用兩段式電容放電加工,可獲得一適當的表面粗糙度Ra2.9μm,此表面粗糙度恰能提供針體對腦部皮層組織足夠的摩擦力,使探針不易脫落。完成的陣列探針,再輔以銀電法快速覆層,以便提高探針表面的電導度。實驗也證實,以批量式放電製作內皮層腦波陣列探針,可獲得最快的成形時間:3.1分/顆,比起單顆探針製作(5.8分/顆),約僅一半的加工時間。完成的內皮層陣列腦波探針進行腦波擷取實驗,所獲得的腦波訊號(α波, β波, θ波, δ波),包括波形強度及波形重現性,皆證實優於市售的腦波電極;而探針使用壽命經1000次插拔及50次的側向搖動測試後,發現探針仍能維持其原有的形狀精度,證實本研究所開發的內皮層陣列探針能精確應用於腦波訊號的量測,並且,所提複合式精微電加工法著實能應用於生醫領域。

    This study presents the development of hybrid micro electro-machining technique in which spiral electrical discharge machining (EDM) and silver plating are employed to fabricate a penetrating intra-cortical probe array for detecting human brain activity. The probe owns a design of 5×5array micro pillar. The height, tip diameter, taper rate of each micro pillar and the inter-pillar spacing are 350µm, 50µm,1:7 and 550µm,respectively. A micro-holes array is first formed on a small rod-shaped copper-chromium (Cu-Cr) workpiece by using spiral EDM and micro tungsten carbide electrode with a 300μmdiameter. Spiral EDM operation is again employed to machine the penetrating intra-cortical probe array on a rod-shaped brass workpiece by applying the finished Cu-Cr electrode. After a series of spiral EDM experiments, it is found that two-step capacity discharge can achieve a surface roughness of Ra2.9μmon the pillar surface, which provides sufficient friction between the contact interfaces. Also, experimental results confirmed that batch spiral EDM can speed the fabrication of probe array up to 3.1 minutes each piece. This time is approaching half of the machining time for single probe array(5.8 minutes). To increase the conductivity of the probe array, silver plating process with 1μmin coating thickness is implemented. Experiment in human brain activity detection is conducted and obtained as α, β, θ and δ activities via the finished penetrating intra-cortical probe array. It was verified that the developed probe array used in the intensity and repeatability of the signal activity is superior to that of the existing commercial probe. After life tests with inserting/pulling out of 1000 times and waggling of 50 times, the form accuracy of the probe can still be kept demonstrated that the developed probe can really be used in measurement of human brain activity. Also, the proposed micro electro-machining technique can contribute significantly to the bio-medical field.

    摘要 i Abstract ii 誌謝 iii 目錄 iv 表目錄 vii 圖目錄 ix 符號說明 xiv 第一章 緒論 1 1.1 前言 1 1.2 文獻回顧 3 1.2.1 常用陣列式腦波探針製法回顧 5 1.2.2 放電加工技術成形精微探針及應用 14 1.2.3 腦波探針覆層之製法回顧 20 1.3 研究動機 24 1.4 研究目的 26 1.5 研究方法 26 第二章 實驗原理 28 2.1 精微放電加工原理 28 2.1.1 精微雕模放電加工機電源迴路 31 2.2 精微線切割放電加工原理 33 2.3 電鍍原理 33 2.4 腦電波圖概論 37 2.4.1 人體腦部構造 37 2.4.2 腦電波圖定義 37 第三章 實驗設備 41 3.1 精微雕模放電加工機 41 3.2 CNC線切割放電加工機 42 3.3 CNC立式綜合加工機 43 3.4 量測儀器設備 43 3.4.1 光學工具顯微鏡 44 3.4.2 掃描式電子顯微鏡 44 3.4.3 3D雷射共軛焦顯微鏡 45 3.4.4 腦波訊號判讀設備 46 3.5 實驗材料 47 3.5.1 碳化鎢電極 47 3.5.2 鉻銅電極與黃銅材料 48 3.5.3 探針覆層材料 49 第四章 內皮層陣列腦波探針素材放電成形 50 4.1 內皮層陣列腦波探針設計 52 4.2 螺旋式放電加工製作陣列微孔電極 54 4.2.1 螺旋式放電加工軌跡路徑規劃 54 4.2.2 放電工作電容對微孔成形的影響 55 4.2.3 電極搖動對陣列微孔尺寸精度的影響 58 4.2.4 碳化鎢電極磨耗探討 60 4.3 螺旋式放電加工製作內皮層陣列腦波探針 63 4.3.1 螺旋式放電加工軌跡路徑規劃 63 4.3.2 探針陣列針數對探針成形時間的影響 64 4.3.3 電極搖動量對陣列探針成形的影響 67 4.3.4 探針陣列針數對牢固力的影響 69 4.3.5 放電脈衝時間(Pulse duration, on)對探針表面粗糙度的影響 71 4.3.6 間隙電壓與電極滯留及離開時間對探針成形效率的影響 76 4.3.7 放電工作電容對探針外徑一致性的影響 82 4.3.8 鉻銅電極磨耗探討 86 4.4 批量內皮層陣列腦波探針製作 88 4.4.1 批量內皮層陣列腦波探針之夾治具設計 88 4.4.2 探針顆數與電流大小對製程時間及表面粗糙度的影響 89 第五章 內皮層陣列腦波探針覆層與腦波訊號偵測 95 5.1 探針受力形變分析討論 95 5.2 探針鍍層厚度控制 97 5.3 腦波訊號偵測 100 5.4 腦波訊號比較 102 5.4.1 探針鍍層厚度與腦波訊號強度比較 102 5.4.2 探針陣列針數與腦波訊號強度比較 103 5.4.3 市售電極與內皮層探針的腦波訊號比較 105 5.4.4 市售電極與內皮層探針的使用次數比較 106 5.4.5 市售電極與內皮層探針的製作成本及生產效能比較 109 5.4.6 腦波波形(α波, β波, θ波, δ波)驗證 110 第六章 結論與未來展望 117 6.1 結論 117 6.2 未來展望 120 參考文獻 122

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