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研究生: 黃健智
論文名稱: 釔鋇銅氧超導微波濾波器設計及製作
Design and Fabrication of YBa2Cu3O7-δMicrowave Filter
指導教授: 張秋男
學位類別: 碩士
Master
系所名稱: 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年: 2008
畢業學年度: 96
語文別: 中文
論文頁數: 79
中文關鍵詞: 超導濾波器交錯耦合
英文關鍵詞: filter, cross coupling
論文種類: 學術論文
相關次數: 點閱:183下載:8
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  • 摘要
    本論文是利用髮夾式共振電路之交錯耦合型微帶線帶通濾波器的架構以及零度饋入的方式來設計高溫超導濾波器。我們以RF濺鍍技術已成功地將中心頻率為2.205GHz的釔鋇銅氧帶通濾波器製造在面積為2×2cm2的氧化鎂 (MgO)基板上。顯示此元件的插入損耗為0.1dB,頻寬為9.6MHz,反射損失為15 dB。量測的結果與我們預期相符合,濾波器具有兩對的傳輸零點較好。

    Abstract
    We report the measurement result of a cross-coupled high-temperature superconducting microstrip bandpass filters made by using hairpin resonators and 0° feed-in transmission dots. This microwave filter was made of YBCO superconducting thin film and designed for a center frequency of 2.205 GHz. It was fabricated on a 2×2 cm2 MgO substrate by a RF sputtering technique. The measurements show that the insertion loss, return loss, and bandwidth are respectively, about 0.1dB, 15dB and 9.6MHz. Our results demonstrate that the filter with two pair transmission zeroes will have better performance.

    目錄 第一章 緒論 1-1研究動機…………………………………………………………………1 1-2超導微波濾波器簡介……………………………………………………2 1-3論文組織架構概要………………………………………………………3 第二章 理論分析及元件設計 2-1 射頻(RF)及 微波(Microwave)簡介...................4 2-2散射參數(Scattering parameter)………………………………7 2-3分佈參數式帶通濾波器設計……………………………………………11 2-4 電腦軟體擬 .....................................25 第三章 濾波器實作與量測 3-1YBCO超導薄膜製備 3-1-1 RF磁控濺鍍設備介紹 …………………………………………29 3-1-2YBCO超導薄膜製備流程與薄膜特性量測與分析 ……………30 3-2光罩製作 3-2-1 光罩製作系統介紹………………………………………………32 3-2-2 光罩製作流程……………………………………………………32 3-3 黃光室微影蝕刻 3-3-1 微影蝕刻機台系統介紹…………………………………………33 3-3-2 曝光顯影蝕刻流程………………………………………………33 3-4 微波特性量測 3-4-1 量測系統介紹……………………………………………………37 3-4-2 量測流程…………………………………………………………39 第四章 量測結果分析與討論 4-1 薄膜的特性量測與分析 ……………………………………………42 4-2微波量測結果與討論…………………………………………………44 4-3 改善方法……………………………………………………………49 第五章 結論 5-1 總結 ………………………………………………………………51 參考文獻 …………………………………………………………………52 附錄 A……………………………………………………………………58 附錄 B……………………………………………………………………70 附錄 C……………………………………………………………………77

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