SU-8厚膜光阻具有優異的機械與化學性質，且使用一般的UV微影製程，即可達到高深寬比的微結構。現今SU-8光阻已應用於LIGA電鑄製程之模版、熱壓成形之模仁、微光合成形、光波導、微流體應用流道或微機械結構等之材料，在直接將SU-8光阻作為微致動器主體結構材料的研究並不多見。本研究目的即是結合低成本的SU-8厚膜光阻製程與釋放(ICP-RIE、光阻犧牲層)技術，製作一體成型的靜電式微夾持器；期望能達到大位移、反應快、操控簡單及應用廣泛之精密微夾持器。另外，並結合電鑄技術製作全金屬的微夾持器結構，藉以探討不同材料對於微夾持器的電性與動態特性差異。在研究中，成功利用ICP-RIE釋放技術，製作出微夾持器，並以起始電壓19.2 V驅動夾爪成功，且於電壓100 V時，即達到最大的夾持量400 mm。而光阻犧牲層釋放技術，一直受限於液體表面張力的影響，未能成功地釋放夾爪結構。此外，全金屬結構製程，雖然成功地製作，但受限於金屬結構本身太過剛硬，使得在電壓190 V時仍然無法作動。

The SU-8 thick photoresist is well known for its mechanical and chemical property and it can be used to easily achieve high aspect ratio microstructures with a traditional UV photolithography. Nowadays, the SU-8 photoresist has been applied to different areas such as serving as the base for LIGA electroforming process of mold, as the mold of hot embossing, and also as the material for microstereolithography, optical waveguides, microchannels or some microstructures. However, little research has been carried on using SU-8 as a material for the main structure of micro-actuator. This research is to combine low-cost SU-8 and ICP-RIE technique to build a unitary electrostatic microgripper. This microgripper is expected to have maximum displacement, fast reflection, and is also easily controlled and can be widely applied. Furthermore, we are also interested in discussing the effect of different material on microgripper’s different performance in the electric and dynamic properties so we also built up all-metal microgripper by using electroforming. We have successfully constructed micro-gripper with ICP-RIE technique and were activated to perform gripping function successfully at 19.2 initial voltage. The maximum displacement (400um) was achieved by applying 100V voltage. However, we are not able to release the structure in the photoresist sacrificial layer releasing technique due to the surface tension of the liquid being used. Moreover, we had successfully constructed a microgripper with all-metal technique but due to the strength of metal structure, it cannot actuate even by applying 190V voltage.

1. 楊啟榮等人, "微機電系統技術與應用", 精密儀器發展中心, 第四章, pp. 142-230 (2003).
2. 張恒中等人, "三軸致動微型機械臂之研究", 國立清華大學動力機械工程學系, 碩士論文, 2003.
3. H. Lorenz, M. Despont, P. Vettiger and P. Renaud, "Fabrication of photoplastic high-aspect ratio microparts and micromoldsusing SU-8 UV resist", Microsystem Technologies, Vol. 4, pp. 143-146 (1998).
4. http://www.microchem.com/
5. 楊啟榮等人, "SU-8厚膜光阻於微系統UV-LIGA製程的應用", 科儀新知 21(5), pp. 46-53 (1998).
6. C. G. Willson, H. Ito, M. J. Frechet and F. Houlihan, "Chemical amplification in the design of polymers for resist application", Pure and applied chemicstry, pp. 207-219 (1982).
7. D. W. Johnson, “MCC Technical Report”, Advance Package Seminar (1998).
8. M. Shaw, D. Nawrocki, R. Hurditch, D. Johson, "Improving the process capability of SU-8", Microsystem Technologies, Vol. 10, pp. 01-06 (2003).
9. http://www.imm-mainz.de/
10. 鐘震桂、盧慧娟、趙天行, "感應耦合電漿的矽非均向蝕刻技術", 第三屆奈米工程暨微系統技術研討會, pp. 83-87 (1999).
11. E. C. Harvey, P. T. Rumsby, M. C. Gower and J. L. Remnant, "Microstructuring by excimer laser", SPIE 2639, pp. 266-277 (1995).
12. M. Despont, H. Lorenz, N. Fahrni, J. Bruger, P. Renaud and P. Vettiger, "High -aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS application", Proceeding of IEEE Micro Electro Mechanical Systems , pp.518-522 (1997).
13. H. Lorenz, M. Despont, N. Fahrni, J. Brugger, P. Vettiger and P. Renaud, "High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS", Sensors and Actuators A, Vol. 64, pp. 33-39 (1998).
14. G. Bleidiessel, G. Gruetzner, F. Reuther, S. Fehlberg, B. loechel and A. Maciossek, "Dependence of the quality of thick resist structures on resist baking", Microelectronic engineering, Vol. 41-42, pp. 433-436 (1998).
15. B. Loechel, "Thick-layer resists for surface micromachining", Journal of Micromech. Microeng., Vol. 10, pp. 108-115 (2000).
16. M. Kubenz, U. Ostrzinski, F. Reeuther, G. Gruetzner, "Effective baking of thick and ultra-thick photoresist layers by infrared radiation", Microelectronic engineering, Vol. 67-68, pp. 495-501 (2003).
17. P. M. Dentinger, W. M. Clift and S. H. Goods, "Removal of SU-8 photoresist for thick film applications", Microelectronic engineering, Vol. 61-62, pp. 993-1000 (2002).
18. C. H. Ho and W. Hsu, "Experimental investigation of an embedded root method for stripping SU-8 photoresist in the UV-LIGA process", Journal of Micromech. Microeng., Vol. 14, pp. 356-364 (2004).
19. 莊昀儒, "微型高分子材料單石熱汽泡式微液滴產生系統之研發", 國立清華大學工程與系統科學系, 博士論文, pp. 136-137 (2003).
20. K. Y. Lee, N. LaBianca, S. A. Rishton, S. Zolgharnain, J. D. Gelorme, J. Shaw and T. H.-P. Chang, "Micromachining applications of a high resolution ultrathick photoresist", Journal of vacuum science and technology B, Vol. 13, pp. 3012-3016 (1995).
21. J. Zhang, K. L. Tan, G. D. Hong, L. J. Yang and H. Q. Gong, "Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS", Journal of Micromech. Microeng., Vol. 11, pp. 20-26 (2001).
22. R. J. Jackman, T. M. Floyd, R. Ghodssi, M. A Schmidt and K. F. Jensen, "Microfluidic systems with on-line UV detection fabricated in photodefinable epoxy", Journal of Micromech. Microeng., Vol. 11, pp. 263-269 (2001).
23. S. Li, Carl B. Freidhoff, R. M. Young and R. Ghodssi, "Fabrication of micronozzles using low-temperature wafer-level bonding with SU-8", Journal of Micromech. Microeng., Vol. 13, pp. 732-738 (2003).
24. F-G Tseng and C-J Lin, "A high sensitive Fabry-Perot shear stress sensor employing flexible membrane and double SU-8 structures", Proceedings of IEEE Sensors , Vol. 2, pp. 969-972 (2002).
25. J. Thaysen, A. D. Yalcinkaya, P. Vettiger and A. Menon, "Polymer-based stress sensor with integrated readout", Journal of Physics D: Applied Physics, Vol. 35, pp. 2698-2703 (2002).
26. I. Roch, P. Bidaud, D. Collard and L. Buchaillot, "Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film", Journal of Micromech. Microeng., Vol. 13, pp. 330-336 (2003).
27. G. Genolet, M. Despont, P. Vettiger, D. Anselmetti, N. F. de Rooij, "All-photoplastic, soft cantilever cassette probe for scanning force microscopy", Journal of vacuum science and technology B, Vol. 18, pp. 617-620 (2000).
28. Y. K. Yoon, J.-H. Park, F. Cros and M. G. Allen, "Integrated vertical screen mcirofilter system using inclined SU-8 structure", Micro Electro Mechanical System IEEE The Sixteenth Annual International Conference on, pp. 227-230 (2003).
29. C. J. Kim, A. P. Pisano, R. S. Muller, and M. G. Lim, "Polysilicon microgripper", Technical digest IEEE solid-state sensor and actuator workshop, pp. 48-51 (1990).
30. C. J. Kim, A. P. Pisano, Member, IEEE, and R. S. Muller, Fellow, IEEE, "Silicon-processed overhanging microgripper", Journal of microelectromechanical system, Vol. 1, pp. 31-36 (1992).
31. M. Mita, H. Kawara, H. Toshiyoshi, M. Ataka and H. Fujita, "An electrostatic 2-Dimensional microgripper for nano structure", The 12th International Conference on Solid State Sensors, Actuators and Microsystems, pp.272-275, (2003).
32. Y. Suzuki, "Flexible microgripper and its application to miromeasurement of mechanical and thermal properties", The 9th International workshop on Micro Electro Mechanical Systems, pp.406-411 (1996).
33. F. Yi, E. Tang, J. Zhang and D. Xian, "A new sacrificial layer method of LIGA technology", Microsystem Technologies, Vol. 6, pp.154-156 (2000).
34. C. S. Pan and W. Hsu, "An electro-thermally and laterally driven polysilicon microactuator", Journal of Micromech. Microeng., Vol. 7, pp. 7-13 (1997).
35. N. T. Nguyen, S. S. Ho and C. L. N. Low, "A polymeric microgripper with integrated thermal actuators", Journal of Micromech. Microeng., Vol. 14, pp. 969-974 (2004).
36. P. Krulevitch, A. P. Lee, P. B. Ramsey, J. C. Trevino, J. Hamilton and M. A. Northrup, "Thin film shape memory alloy microactuators", Journal of Microelectromechanical systems, Vol. 5, pp. 270-282 (1996).
37. A. P. Lee, D. R. Ciarlo, P. A. Krulevitch, S. Lehew, J. Trevino and M. A. Northrup, "A practical microgripper by fine alignment, eutectic bonding and SMA actuation", The 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, pp. 368-371 (1995).
38. A. P. Lee, D. R. Ciarlo, P. A. Krulevitch, S. Lehew, J. Trevino and M. A. Northrup, "A practical microgripper by fine alignment, eutectic bonding and SMA actuation", Sensors and Actuator A, Vol. 54, pp. 755-759 (1996).
39. S. Bttgenbach, S. Btefish, M. L. Schdel and A. Wogersien, "Shape memory microactuators", Microsystem Technologies, Vol. 7, pp. 165-170 (2001).
40. M. Kohl, B. Krevet and E. Just, "SMA microgripper system", Sensors and Actuators A, Vol. 97-98, pp. 646-652 (2002).
41. M. C. Carrozza, A. Menciassi, G. Tiezzi and P. Dario, "The development of LIGA-microfabricated gripper for micromanipulation tasks", Journal of Micromech. Microeng., Vol. 8, pp. 141-143 (1998).
42. M. C. Carrozza, A. Eisinberg, A. Menciassi, D. Campolo, S. Micera and P. Dario, "Towards a force-controlled microgripper for assembling biomedical microdevices", Journal of Micromech. Microeng., Vol. 10, pp. 271-276 (2000).
43. R. Salim, H. Wurmus, A. Harnisch and D. Hlsenberg, "Microgrippers created in microstructurable glass", Microsystem Technologies, Vol. 4, pp. 32-34 (1997).
44. R. Keoschkerjan and H. Wurmus, "A novel microgripper with parallel movement of gripping arms", 8th International Conference on New Actuators, pp. 321-324 (2002).
45. V. Seidemann, S. Btefisch and S. Bttgenbach, "Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers", Sensors and Actuators A, Vol. 97-98, pp. 457-461 (2002).
46. S. Btefisch, V. Seidemann and S. Bttgenbach, "Novel micro-pneumatic actuator for MEMS", Sensors and Actuators A, Vol. 97-98, pp. 638-645 (2002).
47. Y. Lu and C. J. Kim, "Micro-finger articulation by pneumatic parylene balloons", The 12th International Conference on Solid State Sensors, Actuators and Microsystems, pp. 276-279 (2003).
48. W. S. N. Trimmer, "Microrobots and micromechanical systems", Sensors and Actuators A, Vol. 19, pp. 267-287 (1989).
49. J. Branebjerg and P. Gravesen, "A new electrostatic actuator providing improved stroke length and force", IEEE Micro Electro Mechanical Systems, pp. 6-11 (1992).
50. R. Legtenberg, J. Gilbert, S. D. Senturia and M. Elwenspoek, "Electrostatic curved electrode actuators", Journal of microelectromechanical systems, pp. 257-265 (1997).
51. F. Sherman, S. Tung, C. J. Kim, C. M. Ho and J. Woo, "Flow control by using high-aspect ratio, in-plane microactuators", Sensors and Actuators A, Vol. 73, pp. 169-175 (1999).
52. J. T. Ravnkilde, K. P. Larsen and H. Henningsen, "Fabrication of nickel microshutter arrays for spatial light modulation", Proceedings of the 4th meso mechanics conference, pp.1-5 (2002)
53. W. S. N. Trimmer and K. J. Gabriel, "Design considerations for a practical electrostatic micromotor", Sensors and Actuators A, Vol. 11, pp. 189-206 (1987).
54. 楊智仲, "厚膜光阻製程應用於靜電驅動旋轉式微致動器", 國立臺灣師範大學機電科技研究所, 碩士論文, pp. 37-57 (2004).
55. I. H. Song and P. K. Ajmera, "Use of a photoresist sacrificial layer with SU-8 electroplating mould in MEMS fabrication", J. Micromech. Microeng., Vol. 13, pp. 816-821 (2003).
56. 趙俊傑, "類LIGA製程應用於靜電式微致動器光開關之研製", 國立臺灣師範大學工業教育學系, 碩士論文, pp. 88-94 (2003).