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研究生: 吳育儒
Wu, Yu-Ru
論文名稱: 含硼聚晶鑽石輪刀開發與繞射階梯光柵模仁製作研究
Development of a BD-PCD wheel-tool and research of diffractive echelle grating mould machining
指導教授: 陳順同
Chen, Shun-Tong
學位類別: 碩士
Master
系所名稱: 機電工程學系
Department of Mechatronic Engineering
論文出版年: 2012
畢業學年度: 100
語文別: 中文
論文頁數: 109
中文關鍵詞: 繞射階梯光柵放電加工傾斜式高速快淺研削含硼聚晶鑽石刀具
英文關鍵詞: Diffractive echelle grating, Electrical discharge machining, Inclined high-speed & fast shallow grinding, boron-doped polycrystalline composite diamond
論文種類: 學術論文
相關次數: 點閱:185下載:54
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  • 本研究旨在開發一傾斜式高速快淺研削技術(High speed & fast shallow grinding),並應用於繞射階梯光柵(Diffractive echelle grating)模仁的製作。主要目的是為提高繞射階梯光柵製作技術之加工效率與降低其製作成本。研究之初,設計並開發含硼聚晶鑽石(Boron doped polycrystalline composite diamond, BD-PCD)圓盤刀具,透過錐度彈簧套筒設計,使含硼聚晶鑽石刀片與刀軸同時獲致自動對心與鎖固功能。為減少圓盤刀具於放電加工修整時,切刃邊緣因尖端放電而發生的角隅磨耗,本研究提出一種「犧牲電極(Sacrificial electrode)」的策略,使放電電場均勻化,抑制尖端放電現象,以提高刀具角隅精度。此外,為使鑽石輪刀依光柵閃耀角傾斜一角度,以進行傾斜式高速快淺研削加工,本研究開發一加工軸傾角研削模組,並提出對光柵閃耀角的共向研削法,可有效抑制研削延性材料(Ni-P合金)的毛邊生成。而透由優化後的加工參數,亦可於碳化鎢材料上,成功創成光柵常數2.75 μm至8 μm的繞射階梯光柵微結構,且具優異之分光效果。

    The main purpose of the thesis is to develop a technique of inclined high-speed & fast shallow grinding and use in generation of diffractive echelle grating mold to enhance the processing efficiency and decrease the cost for grating mold production. First, a wheel-tool made of boron-doped polycrystalline composite diamond with a sharp corner is schemed and machined. A spring collet which possesses a taper of 1:4 is designed to provide for assembly auto-center between the tool and shank. To avoid the corner wear of wheel-tool during forming, a strategy of sacrificial electrode employed is proposed. This is helpful in making a uniform electric field and suppressing localization at tool-end region to obtain more accurate machining. In addition, a set of inclined clamping mechanism which can stably locate a high-speed spindle to guide the wheel-tool to grind along the blaze angle of grating is developed. A co-direction grinding, in which grinding is carried out along long side of grating and normal direction of blaze plane is proposed to restrain burrs from occurrence. Experimental results demonstrate that the inclined high-speed & fast shallow grinding with co-direction grinding can generate micro grating array with grating constants of 2.75, 4.0 and 8.0 µm, respectively. These machined diffractive echelle grating array can really achieve the separation of light for different wavelengths.

    摘要 iii Abstract iv 致謝 v 目錄 vi 表目錄 x 圖目錄 xi 符號說明 xv 第一章 緒論 1 1.1 前言 1 1.2 研究動機 2 1.3 研究目的 2 1.4 研究方法 3 1.5 文獻回顧 4 1.5.1 階梯光柵文獻回顧 4 1.5.2 階梯光柵製作技術文獻回顧 6 1.5.3 聚晶鑽石應用文獻回顧 12 第二章 階梯光柵製作技術之相關原理 15 2.1 階梯光柵繞射原理 15 2.2 無電鍍(Ni-P)原理 17 2.2.1 無電鍍鎳氧化還原反應過程 17 2.2.2 無電鍍鎳磷之特性 18 2.3 精微放電加工原理 18 2.4 研削原理 20 2.4.1 研削基本原理 20 2.4.2 研削之延性材料移除機制 22 2.4.3 研削之脆性材料移除機制 23 2.4.4 高速快淺研削原理 25 第三章 實驗所需設備 27 3.1 精微加工機 27 3.2 高速主軸 29 3.3 CNC立式銑床 30 3.4 放電鑽孔機 30 3.5 CNC線切割放電加工機 31 3.6 實驗所須之量測儀器設備 32 3.6.1 工具顯微鏡 32 3.6.2 掃描式電子顯微鏡 32 3.6.3 雷射掃描式共軛焦顯微鏡 33 3.6.4 分散式拉曼光譜儀 33 3.7 實驗所用材料 34 3.7.1 含硼聚晶鑽石素材 34 3.7.2 銅線電極 38 3.7.3 碳化鎢電極 38 3.7.4 無電鍍鎳磷合金 39 第四章 實驗方法 40 4.1 階梯光柵精微加工機設計開發 40 4.1.1 加工軸傾角研削模組設計與結構分析 40 4.1.2 階梯光柵精微加工機之自然頻率分析 44 4.1.3 階梯光柵加工模組裝與系統精度校正 48 4.2 含硼聚晶鑽石輪刀設計開發 56 4.2.1 鑽石輪刀之精密刀軸設計 56 4.2.2 鑽石輪刀之精密錐度彈簧套筒設計與製作 57 4.2.3 鑽石輪刀之精密錐孔放電成形 59 第五章 含硼聚晶鑽石輪刀之研削刃成形 60 5.1 w-EDM放電修整成形 60 5.1.1 漸進式多次放電修整 61 5.1.2 改善尖端放電造成角隅磨耗之策略 62 5.2 精微放電修整成形 64 第六章 階梯光柵模具之研削創成 65 6.1 階梯光柵微結構之高速快淺研削實驗 66 6.1.1 主軸轉數對機台振動的影響 68 6.1.2 研削方向對階梯光柵結構的影響 70 6.1.3 研削進深方向對階梯光柵結構的影響 72 6.1.4 各階梯研削方向對階梯光柵結構的影響 73 6.1.5 特徵完成順序對階梯光柵結構的影響 75 6.1.6 含硼聚晶鑽石輪刀研削磨石墨化分析 77 6.2 階梯光柵模仁之製作驗證 78 第七章 結論 84 7.1 結果 84 7.1.1 繞射階梯光柵加工軸傾角研削模組無段傾角設計 84 7.1.2 含硼聚晶鑽石圓盤刀具設計之貢獻 84 7.1.3 提出以犧牲電極修整刀具減少放電角隅磨耗之策略 85 7.1.4 低成本的階梯光柵模仁製作 85 7.1.5 提出以共向研削加工法加工階梯光柵 85 7.2 未來展望 86 參考文獻 87 個人簡歷 94 附錄 95 附錄A 高速主軸各轉數對於各軸位置誤差之影響 95

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