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研究生: 蔡宏桂
Hung-Kuei Tsai
論文名稱: 雷射質量轉印技術製作非正定超穎材料之感測應用
Indefinite metamaterial fabricated by laser induced forward transfer for sensing application
指導教授: 吳謙讓
學位類別: 碩士
Master
系所名稱: 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年: 2013
畢業學年度: 101
語文別: 中文
論文頁數: 49
中文關鍵詞: 雷射質量轉印技術非正定超穎材料雷射直寫式微影技術飛秒雷射系統原子力顯微鏡表面增強拉曼光譜
英文關鍵詞: Laser induced forward transfer, Indefinite metamaterial, Laser direct-writing technology, Femtosecond laser system, Atomic force microscope, Surface enhanced Raman spectroscopy
論文種類: 學術論文
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  • 這篇論文有五個章節。第一個章節是介紹非正定超穎材料之特性及其應用,以及介紹雷射質量轉印技術LIFT(Laser induced forward transfer),第二章節是敘述非正定超穎材料之設計與模擬。第三章節主要詳細介紹實驗中所使用到的儀器,從使用濺鍍機之樣品製作、飛秒雷射之架構與原理、原子力顯微鏡之運作原理及工作模式,第四章為實驗結果,敘述嘗試幾個實驗參數下之原子力顯微鏡影像結果,及量測穿透光譜之光譜結果。最後把製作好的樣品拿去作感測分析,利用拉曼光譜量測表面增強拉曼光譜。

    The thesis consists of five chapters. In chapter 1, We will give a brief review of basic properties of the indefinite metamaterial and the application of the indefinite metamaterial. And introduce the LIFT (Laser induced forward transfer) technique In chapter 2, We will introduce the design and simulation of the indefinite metamaterial. In chapter 3, I will show the experimental process, and the principle of the instrument. From sputtering machine production, the structure and principles of the femto-second laser and atomic force microscopy (AFM) principle and mode of operation. In chapter 4, this chapter is the experimental result. We try some experimental data to fabricate the indefinite metamaterial. And we measure the sample’s transmission spectrum. Finally, we will use the Raman spectrum to measure the sample’s SERS(Surface-enhanced Raman spectroscopy) .

    中文摘要 i 英文摘要 ii 第一章 簡介 1 1-1 論文研究動機及目的 1 1-2 非正定超穎材料之簡介及應用 2 1-3 雷射直寫式微影技術 (Laser direct-writing technology) 7 1-4 雷射推進質量轉移(Laser induced forward transfer) 9 1-4-1 雷射推進質量轉印技術種類 10 1-4-2 接觸式和未接觸式質量轉印 (Contact and non-contact LIFT) 11 第二章 非正定超穎材料之設計與模擬 14 2-1 非正定超穎材料之設計 14 2-2 模擬計算方法介紹 14 2-3 Drude-Lorentz model 15 第三章 實驗架構與製作流程 17 3-1 簡介 17 3-2濺鍍製模系統 18 3-2-1儀器介紹與原理 18 3-2-2 膜層製備 21 3-3 雷射光學系統(Laser and Optical system) 21 3-3-1 實驗架構 21 3-3-2儀器架構及光學元件介紹 22 3-4原子力顯微鏡 31 3-4-1 儀器簡介及用途. 31 3-4-2 原子力顯微鏡之工作模式 31 第四章 實驗結果與分析 35 4-1雷射掃描速度 35 4-2 膜層設計 36 4-3 實驗結果與討論 37 第五章 結論 46 Reference 47

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