研究生: |
楊家豪 Chia-Hao Yang |
---|---|
論文名稱: |
磁控濺鍍銦錫氧化物透明導電膜之材料分析及其應用於矽晶太陽能電池之研究 Materials analysis of indium-tin-oxide optical-transparent films and their applications of silicon solar cells |
指導教授: |
李亞儒
Lee, Ya-Ju |
學位類別: |
碩士 Master |
系所名稱: |
光電工程研究所 Graduate Institute of Electro-Optical Engineering |
論文出版年: | 2012 |
畢業學年度: | 100 |
語文別: | 中文 |
論文頁數: | 42 |
中文關鍵詞: | 斜向濺鍍 、奈米線陣列 、ITO |
論文種類: | 學術論文 |
相關次數: | 點閱:151 下載:0 |
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本論文是利用斜向磁控濺鍍系統成長銦錫氧化物透明導電膜於具有二維奈米線陣列結構的太陽能元件上。系統地分析及量測斜向濺鍍ITO之形態分佈、反射率以及電性,進而探討應用於太陽能電池元件後的光學特性與電性分析。二維奈米線陣列的部分,是利用氫氟酸與硝酸銀在適當的溶液調配比例下發生氧化還原反應所蝕刻而成,所形成之奈米線陣列結構擁有極低的反射率,且在大角度入射的情況下依然得以維持約5%的低反射率。斜角濺鍍則是以射頻濺鍍系統將ITO薄膜成長在蝕刻完成的奈米結構上,並以掃瞄式電子顯微鏡觀察元件的形態且透過積分球與分光儀進行元件反射率的量測,最終獲得一反射率5%,開路電壓為0.56V,光電流為1.54 mA/cm2,轉換效率為0.26% 的太陽能光伏元件。
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