研究生: |
鄭心雄 Shin Shong Jeng |
---|---|
論文名稱: |
近場光學顯微術運用於DVD光碟片奈米記錄點影像之研究 Imaging the nano recording marks on DVD rewritable optical disk with near-field scanning optical microscopy |
指導教授: |
蔡定平
Tsai, Din-Ping |
學位類別: |
碩士 Master |
系所名稱: |
光電工程研究所 Graduate Institute of Electro-Optical Engineering |
論文出版年: | 2007 |
畢業學年度: | 95 |
語文別: | 中文 |
論文頁數: | 78 |
中文關鍵詞: | 近場光學顯微術 、相變化記錄層記錄點 、DVD光碟片 、近場光學影像 |
論文種類: | 學術論文 |
相關次數: | 點閱:187 下載:6 |
分享至: |
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
本論文是將近場光學顯微術運用於DVD光碟片奈米記錄點影像之研究上。目標是在DVD光碟片上寫下奈米記錄點並成功讀取出其光學影像。奈米記錄點的寫入是使用動態測試儀(DDU-1000)寫點,配合導電式原子力顯微鏡(C-AFM)來確認記錄點大小。接著使用NT-MDT之掃探式近場光學顯微儀(NSOM)來擷取奈米記錄點之光學影像。
首先我們研究奈米記錄點的寫入。而寫入記錄點的樣品為市售的DVD光碟片。接著利用動態測試儀(DDU-1000),在光碟片記錄層寫下記錄點。藉由在記錄層上改變不同寫入功率、寫入週期及寫入時間來縮小記錄點。並且由C-AFM得到其記錄層的導電影像,來確認奈米記錄點之寫入。
因為傳統光學顯微術會受到繞射的影響,無法獲得小於繞射極限的光學影像。而近場光學顯微術能夠突破繞射極限獲得更好的光學解析度,所以我們使用近場光學顯微術來量測所寫入的奈米記錄點。藉由近場光學顯微術,我們成功的獲得小於繞射極限的奈米記錄點之光學影像,而最小的點可達120奈米。
總結來說在此篇論文中,我們成功的在DVD光碟片上寫下奈米記錄點,並利用近場光學顯微術獲得奈米記錄點之影像。
參考文獻
[1] 林柏宏, ”光學記錄點之近場光學影像的研究”,國立臺灣師
範大學光電科學研究所碩士論文,第一、二章,(2005)。
[2] G.Binnig, H. Rohrer, C. H. Gerber, and E. Weibel, “ 7 × 7 Reconstruction on Si(111) Resolved in Real Space“, Phys. Rev. Lett. 50, 120 (1983).
[3] G. Binnig, C. F. Quate, C. H. Gerber, “Atomic Force Microscope“, Phys. Rev. Lett. 56, 930 (1986).
[4] C. C. Willams, H. K. Wickramasinghe ,”Scanning Joule Expansion Microscopy at Nanometer Scales”, Appl. Phys. Lett. 49, 187 (1987).
[5] Y. Martin, H. K. Wickramasinghe, ”Magnetic imaging by “force microscopy'' with 1000 Å resolution”, Appl. Phys. Lett. 50, 1455 (1987).
[6] D. W. Pohl, “Advances in Optical and Electron Microscopy”, Academic, London, 234-312 (1990).
[7] Y. Martin, D. W. Abraham, H. K. Wickramsinghe, “High resolution capacitance measurement and potentiometry by force microscopy”, Appl. Phys. Lett. 52, 1103 (1988).
[8] K. Takata. T. Hasegawa, S. Hosaka, S. Hosoki, T. Komoda " Tunneling acoustic microscope," Appl. Phys. Lett. 55, 1718 (1989).
[9] E. Betzig, P. L. Finn, J. S. Weiner, “ Combined shear force and near-field scanning optical microscopy“, Appl. Phys. Lett. 60, 2484 (1992).
[10] R. Toledo-Crow, P. C. Yang, M. Vaze-iravani, ”Near-field differential scanning optical microscope with atomic force regulation”, Appl. Phys. Lett. 60, 2957 (1992).
[11] E. Abbe, “Betrage zur Theorie der Microscope und der Microscopischen Wahrehmung”, Arch. Mikrosk. Anst. 9, 413-468 (1873).
[12] L. Rayleigh, “On the theory of optical images with special reference to the microscope”, Philos. Mag. 5 (42),167-195 (1986).
[13] E. A. Synge, Phil. Mag. 6, 356 (1928).
[14] J. A. O’Keefe, “Resolving power of visible light,” J. Opt. Soc. Am. 46, 359-361 (1956).
[15] E. A. Ash, and G. Nicholls, “Super-resolution aperture scanning microscope”, Nature(London) 237, 510-512 (1972).
[16] 蔡定平,”近場光學顯微術簡介”,物理雙月刊第十八卷第三期, 375-384頁,(1996)。
[17] G. A. Massey, “Microscopy and pattern generation with scanned evanescent waves”, Appl. Opt. 23, 658-660 (1984).
[18] J. M. Vigoureux, F. Depasse, and C. Girard, “Superresolution of near-field optical microscopy defined from properties of confined electromagnetic waves”, Appl. Opt. 31, 3036-3045 (1992).
[19] D. W. Pohl, W. Denk, and M. Lanz, “Optical stethoscopy: image recording with resolution λ/20”, Appl. Phys. Lett. 44, 651-655 (1984).
[20] E. Betzig, A. Harootunian, A. Lewis, and M. Isaacson, “Near field diffraction by a slit: Implications for superresolution microscopy,” Appl. Opt, 25, 1890-1900 (1986).
[21] R. Reddick, R. J. Warmack, and T. L. Feerrell, ”New form of scanning optical microscopy”, Phys. Rev. B39, 767 (1989).
[22] E. Betzig, P. L. Finn, and J. S. Weiner,“ Combined shear force and near-field scanning optical microscopy“, Appl. Phys. Lett. 60, 2484 (1992).
[23] R. Toledo-Crow, P. C. Yang,and M. Vaze-iravani, “Near-field differential scanning optical microscope with atomic force regulation”, Appl. Phys. Lett. 60, 2957-2959 (1992).
[24] 蔡定平,“近場光學顯微術及其應用“,科儀新知,第十七卷第 五期,10-19頁,(1996)。
[25] F. Zenhausern, “Apertureless near-field microscope“, Appl. Phys. Lett. 65, 1623 (1994).
[26] E. Abbe, Arch. Mikrosk. Anst. 9, 413-468 (1873).
[27] S. R. Ovshinsky, “Reversible Electrical Switching Phenomena in Disordered Structures,” Phys. Rev. Lett. 21, 1450 (1968).
[28] R. Zallen, “The Physics of Amorpous Solids”, John Wiley and Sons, New York, (1983).
[29] T. Ohta , “Phase-Change Optical Memory Promotes the DVD Optical Disk”, J. Opt. Adv. Mat. 3, 609 (2001).
[30] M. Chen, K. A. Rubin, V. Marrello, U. G. Gerber, V. B. Jipson, “Reversibility and Stability of Tellurium Alloys for Optical Data
Storage Applications,” Appl. Phys. Lett. 46, 734 (1985).
[31] M. Okada, S. Ohkubo, T. Ide, M. Murahata, H. Honda, and T. Matsui, “High-density phase-change optical disk with a Si reflective layer,” Proc. SPIE. 2514, 329 (1995).
[32] W. G. Hankel, Abh. Sachs. 12, 457 (1881).
[33] W. G. Hankel, Ber. Sachs. 33, 52 (1881).
[34] D. W. Pohl, W. Denk, and M. Lanz, “Optical stethoscopy: Image recording with resolution /20“, Appl. Phys. Lett. 44, 51-655 (1984).
[35] E. Betzig, M. Isaacson, and A. Lewis, “Collecting mode near-field scanning optical microscopy“, Appl. Phys. Lett. 51, 2088-2090 (1987).
[36] R. Reddick, R. J. Warmack, T. L. Feerell, “New form of scanning optical microscopy“, Phys. Rev. B 39, 767 (1989).
[37] M. Abramowitz, “Microscope: Basics and Beyond”, Olympus Microscopy Resource Center (2003).
[38] “MediaTest-I_manual,” Toptica Phonetic AG (2003).
[39] 徐豪汶, ”鍺銻碲相變化奈米薄膜之奈米尺度光熱性質的研究”,國立中央大學物理研究所碩士論文,第一、二章,(2006)。
[40] S. K. Lin, I. C. Lin, and D. P. Tsai, ”Characterization of nano recorded marks at different writing strategies on phase-change recording layer of optical disks”, O. E. Vol. 14, No.10 , 4452 (2006).
[41] O. ISHIYAMA, ” High-Resolution Imaging of Recording Marks on Phase-Change Film by Lateral Force Microscopy”, J. J. Appl. Phys. Vol. 43, 6356–6357 (2004).
[42] M. Sakai,S.Mononobe, ”Observation of Amorphous Recording Marks Using Reflection-Mode Near-Field Scanning Optical Microscope Supported by Optical Interference Method”, J. J. Appl. Phys. Vol. 44, No. 9A, 6855–6858 (2005).
[43] T. Tadokoro, T. Saiki, K. Yusu, ”High-Resolution Examination of Recording Marks in Phase-Change Media Using a Scanning Near-Field Optical Microscope,” J. J. Appl. Phys. Vol. 39, 3599–3602 (2000).
[44] S. H. Chen, S. P. Hou, J. H. Hsieh, ”Writing and erasing efficiency analysis on optical-storage media using scanning surface potential microscopy”, J. Vac. Sci. Technol. A 24(6) (2006).
[45] M. SCHÜTTLER, M. LEUSCHNER, and H. GIESSEN, “Imaging the Internal Structure of Recording Marks on an Optical Disc by Internal Reflection Scanning Near-Field Optical Microscopy”, J. J. Appl. Phys. Vol. 38 1463–1465 (1999).
[46] M. YAMAGUCHI, Y. SASAKI, H. SASAKI, “Imaging of optical disc using reflection-mode scattering-type scanning near-field optical microscopy”, Journal of Microscopy, 194, 552–557 (1999).
[47] H. Miura, Y. Hayashi, S. Fujita, K. Ujiie,and K. Yokomori, “Recording of 0.1 Micron Minimum Mark Size in a New Phase Change Media”, SPIE, Vol. 4090 (2000).