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研究生: 鄭心雄
Shin Shong Jeng
論文名稱: 近場光學顯微術運用於DVD光碟片奈米記錄點影像之研究
Imaging the nano recording marks on DVD rewritable optical disk with near-field scanning optical microscopy
指導教授: 蔡定平
Tsai, Din-Ping
學位類別: 碩士
Master
系所名稱: 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年: 2007
畢業學年度: 95
語文別: 中文
論文頁數: 78
中文關鍵詞: 近場光學顯微術相變化記錄層記錄點DVD光碟片近場光學影像
論文種類: 學術論文
相關次數: 點閱:187下載:6
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  • 本論文是將近場光學顯微術運用於DVD光碟片奈米記錄點影像之研究上。目標是在DVD光碟片上寫下奈米記錄點並成功讀取出其光學影像。奈米記錄點的寫入是使用動態測試儀(DDU-1000)寫點,配合導電式原子力顯微鏡(C-AFM)來確認記錄點大小。接著使用NT-MDT之掃探式近場光學顯微儀(NSOM)來擷取奈米記錄點之光學影像。
    首先我們研究奈米記錄點的寫入。而寫入記錄點的樣品為市售的DVD光碟片。接著利用動態測試儀(DDU-1000),在光碟片記錄層寫下記錄點。藉由在記錄層上改變不同寫入功率、寫入週期及寫入時間來縮小記錄點。並且由C-AFM得到其記錄層的導電影像,來確認奈米記錄點之寫入。
    因為傳統光學顯微術會受到繞射的影響,無法獲得小於繞射極限的光學影像。而近場光學顯微術能夠突破繞射極限獲得更好的光學解析度,所以我們使用近場光學顯微術來量測所寫入的奈米記錄點。藉由近場光學顯微術,我們成功的獲得小於繞射極限的奈米記錄點之光學影像,而最小的點可達120奈米。
    總結來說在此篇論文中,我們成功的在DVD光碟片上寫下奈米記錄點,並利用近場光學顯微術獲得奈米記錄點之影像。

    第 一 章 近場光學顯微術簡介…………………........………….1 1-1 顯微術簡史……………………………………………...……...….1 1-2 掃描探針顯微術……………………………………………….......4 1-2-1 探針顯微術的崛起…………………………………………....4 1-2-2 原子力顯微鏡………………………………..………………..5 1-3 近場光學簡介……………………………………..……………...10 1-3-1 光學繞射極限………………………………………………..10 1-3-2 近場光學初始概念…………………………………………..11 1-3-3 近場光學原理………………………………..……………....12 1-4 近場光學顯微術…………………………………………..….......16 1-4-1 近場光學顯微術崛起……………………………………......16 1-4-2 近場光學顯微術工作模式………………………………......17 1-5 實驗動機…………………………………………………………..20 第 二 章 實驗架構…………………………..………...................22 2-1 樣品的材料特性……………………………..………..................22 2-1-1 相變化(phase change)材料的性質…....…………….......... 22 2-1-2 相變化光碟之記錄原理……..…..………...........................24 2-1-3 相變化光碟片的結構…..……...………..............................26 2-2 樣品製備…………………........................................................29 2-2-1 光碟測試機(DDU-1000) ...................................................29 2-2-2 記錄點檢測系統(C-AFM) .................................................32 2-3 近場光學顯微儀架構................................................................35 2-3-1 石英音叉震盪器工作原理.................................................35 2-3-2 光纖探針的製作儀............................................................37 2-3-3 非光學式石英音叉距離感測式顯微...................................40 2-3-4 近場光學顯微儀主要光學元件介紹...................................42 2-3-5 近場光學顯微儀的量測流程..............................................44 第 三 章 實驗結果與討論………………………………..……...47 3-1 使用光纖送光-物鏡收光為實驗架構量測DVD記錄點之近場光學 影像..……………………………………………………..……….48 3-2 使用物鏡送光-光纖收光為實驗架構量測DVD記錄點之近場光學 影像..……………………………………………………..……….53 3-3 研究繞射極限以下之奈米記錄點之寫入與讀取並獲得高光學對比度之影像……..…………………………………………..……….60 3-4 比較CNR值與近場光學影像對比度的關係…………...………72 第 四 章 總結……………………………..……………….……….73 參考文獻…………………………………...……………..….……….75

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