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研究生: 陳安喬
An-Chiao Chen
論文名稱: 矽基太陽能電池熱處理分析及製程技術比較
Heat Treatment Analysis and Process Technology of Silicon Based Solar Cell
指導教授: 李敏鴻
Lee, Min-Hung
學位類別: 碩士
Master
系所名稱: 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年: 2009
畢業學年度: 98
語文別: 中文
論文頁數: 64
中文關鍵詞: 矽基太陽能電池熱處理分析及製程技術比較
英文關鍵詞: Heat Treatment Analysis and Process Technology of Silicon Based Solar Cell
論文種類: 學術論文
相關次數: 點閱:150下載:0
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  • 現今太陽能電池的種類很多,不過市場上主要還是以矽基為主,因此在本實驗中以矽基太陽能電池來探討。目前非晶矽太陽能電池中所使用的透明導電層各有不同,為了瞭解其差異,在實驗中使用FTO玻璃和ITO玻璃來當基板,完成太陽能電池製作後進行熱處理,使用不同條件的快速退火溫度,然後觀察其各種特徵參數的改變,如開路電壓、短路電流、填充因子、轉換效率等。而從實驗結果來看,可以發現FTO玻璃可以承受的溫度較高,各種特徵參數不會隨升溫而迅速變差,並從串聯電阻和分流電阻來探討其原因。
    另一方面,高效率的異質接面太陽能電池(HIT)也是實驗探討的內容之一,提高效率即可降低其生產成本,故從製程方面的參數改變,如使用的基板種類、基板厚度、背電場的有無等等,來探討其最佳化的參數設計,以提高其效率。從實驗中可發現,有製作背電場和使用IC等級的晶圓,的確可以達到較好的效率,期望未來可以改良製程條件和參數等,達到最佳化的條件,進一步提高異質接面太陽能電池的效率。

    The state-of-the-art solar cells have many types, but silicon based type is the mainstream for the market. Therefore, we will discuss the Si-based solar cell in this study. Several kinds of transparent conductive layer (TCO) are suited for amorphous Si solar cell. We used the FTO glass and ITO glass to investigate performance, as well as the heat treatment with different annealing condition will be performed. The devices parameters are extracted, such as open circuit voltage (VOC), short circuit current (ISC), fill factor (F.F), conversion efficiency (η). After the thermal annealing of a-Si:H thin film solar cell on FTO glass, the efficiency has slight enhanced until 250 C, and degraded at 300 C. The phase transition of a-Si:H is occurred for 300C annealing and makes Rsh decreasing dramatically. We also discussed the results from the series resistance (Rs) and shunt resistance (Rsh).
    On the other hand, high-efficiency Heterojunction with Intrinsic Thin Layer (HIT) solar cell also is fabricated and studied in this work. The higher efficiency means the cost down for solar cell market. Therefore, we will optimize the process parameters, such as the substrate types, substrate thickness, back surface electric field, etc. The efficiency is improved with back surface electric field (BSF) with IC grade wafer. We expect the process and structure optimization with high efficiency solar cells for next generation.

    Publication List I 中文摘要 II 英文摘要 III 致謝 IV 目錄 V 圖目錄 VIII 表目錄 XI 第一章 緒論 1-1. 研究背景 1 1-2. 研究動機 3 1-3. 非晶矽鍺合金薄膜在太陽能電池應用文獻 4 1-3-1. 簡介 4 1-3-2. 非晶矽合金薄膜 6 1-3-3. 非晶矽鍺合金薄膜 7 第二章 太陽能電池基本理論 2-1. 太陽能電池原理 15 2-1-1. 能量轉換效率 19 2-1-2. 量子效率 19 第三章 非晶矽薄膜太陽能電池備製在不同基板和退火處理 3-1. 簡介 20 3-2. 非晶矽薄膜太陽能電池實驗方法 22 3-2-1. 非晶矽薄膜太陽能電池備製 22 3-2-2. FTO玻璃(SnO2:F)與ITO玻璃(In2O3:Sn) 25 3-3. 快速退火處理(RTA) 28 3-4. 實驗結果比較與結論 29 3-4-1. 光電流 29 3-4-2. 暗電流 32 3-4-3. 量子效應 35 3-4-4. Rs & Rsh 36 3-4-5. 太陽能電池的四種特徵參數 39 第四章 HIT太陽能電池(Heterojunction with Intrinsic Thin-layer Solar Cell) 4-1. 簡介 42 4-2. 實驗方法 46 4-2-1. HIT太陽能電池備製 46 4-2-2. 晶圓磨薄和BSF(back surface field ) 48 4-3. 實驗結果與討論 50 4-3-1. IC grade 基板 50 4-3-2. Solar grade 基板 54 4-3-3. IC與Solar等級晶圓之HIT結論 56 第五章 結論 5-1. 結論 58 5-2. 未來工作 59 參考文獻 61

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