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研究生: 鍾岳庭
Yueh-Ting Chung
論文名稱: 數位全像顯微系統特性、參數與規格之研究
A Study on characteristics, parameters and specifications of Digital Holographic Microscope system
指導教授: 鄭超仁
Cheng, Chau-Jern
學位類別: 碩士
Master
系所名稱: 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年: 2011
畢業學年度: 99
語文別: 中文
論文頁數: 87
中文關鍵詞: 數位全像顯微系統數值重建焦深拓展
英文關鍵詞: Digital holographic microscopy system, Numerical reconstruction, Extended depth of focus
論文種類: 學術論文
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  • 在本論文中,主要研究離軸式數位全像顯微系統之特性,討論各個參數對系統的影響,並制定出此數位全像顯微系統的規格。本研究工作首先探討目前數位全像顯微術的發展現況,數位全像顯微術的量測能力隨著各項研究越來越精確,在重建的過程中將結合濾波處理以提高影像對比,並且濾波範圍將與系統中所使用的物鏡相關,最後將所量測到樣本的相位資訊經由相位展開技術來獲得其原來的三維資訊,並且利用數位全像顯微術的數值重建特點,解決因為物鏡所限制住的焦深問題,完成焦深拓展的工作,並且於現行堪稱顯微技術強大的原子力顯微術量測結果做比較。本研究將制定出此數位全像顯微系統的規格,內文中將提出相關模擬與實驗結果,並加以分析說明。

    In this study, we investigate the characteristics of off-axis digital holographic microscope system (DHM) and discuss the influence of various parameters on this system. First, we study the present situation and the development of digital holographic microscopy, and we know the measurement capability of digital holographic microscopy more accurate. In the reconstruction process will be combined with filtering to enhance image contrast, and the filter range is related to the objective in this system. The phase of the samples will be measured and to obtain the three-dimensional profile by phase unwrapping techniques. Using numerical reconstruction calculation to get a clear reconstructed image, and to expanded the depth of focus. The result by the EDOF DHM and atomic force microscopy (AFM) are compared. Finally, we will show the specifications of Digital Holographic Microscope system, and the analytical and experimental results are presented and discussed.

    論文摘要.........................................................................................................................I ABSTRACT...................................................................................................................II 論文授權書...................................................................................................................III 目錄...............................................................................................................................IV 參考文獻........................................................................................................................V 第一章緒論.................................................................................................................1 1.1 數位全像顯微術的發展及現況.....................................................................1 1.2 研究動機及挑戰.............................................................................................5 1.3 文獻分析.........................................................................................................7 1.3.1 數位全像顯微術之相位量測.............................................................7 1.3.2 拓展焦深.............................................................................................9 1.4 論文架構.......................................................................................................12 第二章數位全像顯微術之原理及成像特性...........................................................13 2.1 數位全像顯微術之記錄與重建原理...........................................................13 2.1.1 記錄程序...........................................................................................13 2.1.2 重建程序...........................................................................................17 2.2 光學成像特性...............................................................................................20 第三章數位全像顯微系統之參數分析...................................................................22 3.1 球面相位與傾斜相位校正...........................................................................22 3.2 相位展開技術...............................................................................................26 3.2.1 模擬與實驗結果...............................................................................28 3.3 數位全像顯微系統架構...............................................................................37 3.3.1 光源與物鏡.......................................................................................38 3.3.1.1 理想解析度...........................................................................40 3.3.1.2 截止頻率...............................................................................42 3.3.1.3 視野範圍與焦深...................................................................46 3.3.2 攝影機................................................................................................51 3.3.2.1 截止頻率...............................................................................53 3.3.2.2 Fill factor...............................................................................53 3.3.2.3 縱向與橫向解析度...............................................................56 第四章數位全像顯微系統之規格制訂...................................................................61 4.1 數位全像顯微系統規格總列.......................................................................61 4.2 實驗結果.......................................................................................................69 4.2.1 微透鏡陣列之量測...........................................................................69 4.2.2 Polymer microsphere之量測............................................................82 第五章結論與未來展望...........................................................................................84

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