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研究生: 張子韋
Chang, Tzu-Wei
論文名稱: 利用掃描穿隧顯微鏡探測在二硫化鉬上表面缺陷的電子特性
Investigation of Electronic Properties of Surface Defects on MoS2 by Scanning Tunneling Microscope
指導教授: 邱雅萍
Chiu, Ya-Ping
學位類別: 碩士
Master
系所名稱: 物理學系
Department of Physics
論文出版年: 2016
畢業學年度: 104
語文別: 中文
論文頁數: 41
中文關鍵詞: 二硫化鉬表面缺陷掃描穿隧顯微鏡機械剝離法
英文關鍵詞: Molybdenum disulphide, scanning tunneling microscopy, surface states of defects, mechanical exfoliation
DOI URL: https://doi.org/10.6345/NTNU202204362
論文種類: 學術論文
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  • 在N型半導體,缺陷通常扮演著捕捉電子的角色,因為其表面缺陷的能態大部分落在能隙中,導致導帶電子會掉到缺陷的表面能態裡,也就是電子被捕捉了,所以N型半導體在表面上都是電子空乏的。然而根據文獻指出,在N型半導體中也有些特例如InN,其表面的缺陷能態會提供電子出來,因缺陷的表面態位於導帶之上,導致缺陷的電子就提供到材料表面,所以表面更為導電,造成電子聚集在表面的現象,稱為表面載子累積,此現象進而影響到表面的電導率。由研究指出,在二硫化鉬厚度減少的情況下,電導率上升,雖然在電導值的量測上已經有一些相關的證據,但還是缺乏了一個直接的證據,說明缺陷的能態密度是對表面有影響的。因此,本實驗利用掃描穿隧顯微鏡,直接觀察於表面缺陷的電子特性,並透過機械剝離法,探討缺陷能態密度的變化。本實驗量測結果發現,在靠近導帶的dI/dV曲線特徵峰值,主要由鉬的懸鍵上的未配對電子所貢獻,而另一靠近價帶的dI/dV曲線,較微弱的特徵峰值是由硫缺所貢獻,在機械剝離法後發現,硫缺的能態密度會因為氧氣分子的吸收進而降低能態密度。

    In n-type semiconductors, defects often play a role of capturing electrons. Because most energy states of defects are located in the band gap, electrons of the conduction band drop into the surface states of defects which means electrons are captured, so that electrons vacancy happened on the surface of n-type semiconductors. According to the previous study, the energy states of defects provide electrons to surface because the surface states of defects are above the conduction band, which makes the surface more conductive and electrons accumulating on the surface. This phenomenon is called surface accumulation. From the previous research, conductivity arises when the thickness of conductivity decreases. Even though there are some studies provide the measurement of conductance, direct evidence is still lacked to prove the affects of the energy states of defects on the surface. In this work, scanning tunneling microscopy was utilized to direct observe the electronic properties of defects at MoS2 surface at nano resolution, with and without mechanical exfoliation. A defect state close to the conduction band edge, arising from the dangling bonds of the Molybdenum due to their unsaturated charges. The other is a shallow state close to the valence band edge as a result of sulfur vacancy. After mechanical exfoliation, Oxygen adsorption suppresses the density of states values of sulfur vacancy defect.

    目錄 摘要 i Abstract ii 致謝 iii 目錄 iv 圖目錄 vi 表目錄 ix 第一章 緒論 1 1-1 二硫化鉬基本特性 1 1-2 二硫化鉬的電導與厚度之相依特性 3 1-3 表面缺陷能態對材料所造成的影響 5 第二章 研究動機 7 第三章 實驗儀器與原理 8 3-1 掃描穿隧顯微鏡(Scanning tunneling microscopy, STM ) 8 3-2 量子穿隧效應(Quantum tunneling effect ) 10 3-3 掃描穿隧能譜 (Scanning tunneling spectroscopy, STS ) 12 3-4 掃描模式 14 3-4-1 定電流模式 14 3-4-2 定高度模式 15 3-4-3 電流影像穿隧能譜(Current image tunneling spectroscopy, CITS) 16 3-5 掃描探針製備 17 3-6 超高真空系統 19 3-6-1 真空計 19 3-6-2 真空幫浦 21 第四章 實驗結果 24 4-1 二硫化鉬之形貌分析 24 4-2 二硫化鉬表面缺陷之電性分析 26 4-2-1 缺陷對區域電上的影響 26 4-2-2 缺陷在空間上電性曲線解析 27 4-3 機械剝離法後二硫化鉬的表面形貌比較 29 4-4 機械剝離法後二硫化鉬缺陷電性分析 30 4-4-1 機械剝離法後缺陷對區域電性上的影響 30 4-4-2 機械剝離法後缺陷在空間上電性曲線 31 第五章 實驗討論 33 5-1 正負偏壓特徵峰值的成因 33 5-2 形貌與電性曲線的比對 34 5-3 機械剝離法前後的電性曲線比較 35 5-3-1 機械剝離法前後無缺陷區域的電性曲線 35 5-3-2 機械剝離法前後有缺陷區域的電性曲線 36 5-4 機械剝離法前後的缺陷密度增加 38 第六章 結論 39 參考文獻 40

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