研究生: |
蕭博唐 Po-Tang Hsiao |
---|---|
論文名稱: |
化學氣相沉積石墨烯轉移方式的改良以及元件的製作 |
指導教授: |
江佩勳
Jiang, Pei-hsun 陳啟東 Chen, Chii-Dong |
學位類別: |
碩士 Master |
系所名稱: |
物理學系 Department of Physics |
論文出版年: | 2014 |
畢業學年度: | 102 |
語文別: | 中文 |
論文頁數: | 41 |
中文關鍵詞: | 石墨烯 、轉印 、懸浮元件 、化學氣相沉積法 |
英文關鍵詞: | graphene, transfer, suspended device, chemical vapor deposition |
論文種類: | 學術論文 |
相關次數: | 點閱:275 下載:17 |
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在氣相沉積的石墨烯元件製備中,一般都會使用甲基丙烯酸甲酯(Polymethylmethacrylate,PMMA)作為轉移用的中間介質,但如何去除PMMA、光阻等聚合物的殘留物,避免影響石墨烯電性、鍵結等性質,一向是一個重要課題。我們發展出一種製程,透過舉離、壓印等方法盡可能地減少聚合物在製程中的參與,並用以製備石墨烯場效應電晶體、懸浮石墨烯奈米線等元件,並透過電性量測與拉曼光譜驗證石墨烯元件的品質。
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