研究生: |
黃暐仁 Wei-Ren Huang |
---|---|
論文名稱: |
大負斜角精微聚晶鑽石球型研削工具開發與微小碳化鎢模仁加工研究 Development of micro BD-PCD ball grinding tool with a large negative-back-rake-angle and research of micro tungsten carbide die machining |
指導教授: |
陳順同
Chen, Shun-Tong |
學位類別: |
碩士 Master |
系所名稱: |
機電工程學系 Department of Mechatronic Engineering |
論文出版年: | 2012 |
畢業學年度: | 100 |
語文別: | 中文 |
論文頁數: | 108 |
中文關鍵詞: | 高剛性桌上型工具機 、精微聚晶鑽石球型研削工具 、碳化鎢模仁陣列 |
英文關鍵詞: | High rigidity tabletop machine tool, micro BD-PCD ball grinding, tungsten carbide die array |
論文種類: | 學術論文 |
相關次數: | 點閱:663 下載:6 |
分享至: |
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
本研究旨在開發、設計及製造「大負斜角的BD-PCD球型研削工具」,並應用高剛性桌上型工具機,進行微小碳化鎢模仁的研削創成加工研究。研究之初,以粒徑10-15 µm的BD-PCD片料,利用高週波銀焊技術,將其焊至碳化鎢刀柄上。聚晶鑽石刀具粗胚再以旋轉式線切割放電加工法,成形精微含硼聚晶鑽石球型研削工具。為避免材料移除過程中,研削工具與碳化鎢模仁因高速研削與擠壓,而引發研削刃與模仁的脆性破壞,本研究提出一種「大負後斜角設計」的概念,使球型研削工具刀頂面與工具中心線具-50°的大後斜角。如此設計,可使球型研削工具上的微細鑽石切刃與碳化鎢模仁均承受壓應力,免於脆性破壞。為預防球型研削工具中心點因研削速度為0,而發生的擠壓破壞,研削工具刀頂面設計以跨越工具中心線,以避免靜態擠壓。球型研削工具採線上線切割放電成形,亦即球型研削工具被加工與球型研削工具加工碳化鎢模仁的過程中,研削工具均不拆卸,以便維持其最高同心精度,且可省卻繁複校正時間。而碳化鎢模仁以高速快淺研削技術及浸油對流方式,進行研削創成,實驗結果顯示,無論是微小溝槽或微小陣列式非球面模穴的加工,均可獲致高形狀精度與良好的表面性狀,微溝及非球面模穴的表面粗糙度分別達Ra 112 nm與1.29 µm。顯示本研究開發的精微含硼精微聚晶鑽石球型研削工具,能成功應用於精微非球面碳化鎢模仁的開發製作,其製程所需成本低、環保且加工精度高,未來可應用於照明等級的精微透鏡產業應用。
The primary purpose of the thesis is to develop a micro BD-PCD ball grinding tool with a large negative-back-rake-angle and using the finished tool to generate micro tungsten carbide die array. The BD-PCD substrate with diamond grit of 10-15 µm is first welded onto a WC shank by means of high-frequency silver brazing. Subsequently, the micro BD-PCD ball grinding tool is formed by rotary wire Electrical Discharge Machining (RWEDM). To prevent the occurrence of squeeze failure between the tool and die, the negative-back-rake-angle of the tool is designed up to -50° whereby the diamond grain and WC die can all bear uniform compression stress. In addition, the tool face is schemed with crossing the center line of tool so as to avoid squeeze effect occurs at the center of the free end of the tool due to it being devoid of cutting speed. The developed grinding tool is used to grind WC die using an in-situ HSFSG (High-Speed & Fast-Shallow Grinding) technique. Generating the aspheric micro die array in-situ saves a lot of time and fiddly pre-processing in the development of micro molds. Experimental results demonstrate that the micro aspheric die array with high dimensional and geometrical accuracy can be achieved successfully. The surface roughness of the microgroove and die-cavity is down to Ra 112 nm and 1.29 µm, respectively. The BD-PCD ball grinding tool is evaluated and discussed with regard to thermal machinability, graphitizing of diamond, orientation of spark erosion and wear processes as well as life expectancy. It is expected that the techniques used in the development of micro die array in WC should contribute greatly to the field of precision optoelectronic industry.
1. M. Jalie,〝The Principles Ophthalmic Lenses〞, London: The Association of Dispensing Opticians, 1992
2. 南京神童特種玻璃技術有限公司,〝ZnSe遠紅外線玻璃〞,
http://www.shentong.cc/hongwaixianboli.html
3. T. Zhou, J. Yan, J. Masuda, T. Kuriyagawa, 〝Investigation on the viscoelasticity of optical glass in ultraprecision lens molding process〞, Journal of Materials Processing Technology, Vol.209, pp.4484-4489, 2009
4. J. Colegrove,〝Pocket Projector Technology and Market Forecast〞, Display Search, 2010
5. 李佳恬, 〝待起飛的微投影產業概況分析, 工業技術研究院〞, Vol.10005, 2011
6. D.A. Axinte, D.S. Srinivasu, M.C. Kong, P.W. Butler-Smith,〝Abrasive waterjet cutting of polycrystalline diamond:A preliminary investigation〞, International Journal of Machine Tools & Manufacture, Vol.49, pp.797-803,2009
7. S.W. Youn, M. Takahashi, H. Goto, R. Maeda,〝Fabrication of micro-mold for glass embossing using focused ion beam,femto-second laser, eximer laser and dicing techniques〞, Journal of Materials Processing Technology, Vol.187-188, pp.326-330, 2007
8. G. Chung, 〝Characteristics of SiCN microstructures for harsh environment and high-power MEMS applications〞, Microelectronics Journal, Vol.38, pp.888-893, 2007
9. D. Keen,〝Extraneous inclusions in Al/Si alloy pistons: their effect on single crystal and polycrystalline diamond turning tool edges〞, Wear, Vol. 31, pp.185-188, 1975
10. Z.L. Wang, Q. Luo, L.W. Liu, C.Y. Li, H.X. Yang, H.F. Yang, J.J. Li, X.Y. Lu, Z.S. Jin, L. Lu,〝C.Z. Gu, The superconductivity in boron-doped polycrystalline diamond thick films〞, Diamond & Related Materials, Vol. 15, pp.659-663, 2006
11. H. Suzuki, T. Moriwaki, Y. Yamamoto, Y. Goto, 〝Precision Cutting of Aspherical Ceramic Molds with Micro PCD Milling Tool〞, Annals of the CIRP Vol. 56, pp.131-134, 2007
12. K. Suzuki, Y. Shiraishi, N. Nakajima, M. Iwai, S. Ninomiya, Y. Tanaka, T. Uematsu,〝Development of New PCD Made Up of Boron Doped Diamond Particles and its Machinability by EDM〞, Advanced Materials Research, Vol. 76-78, pp. 684-689, 2009
13. C. Nath, M. Rahman, K. S. Neo,〝Machinability study of tungsten carbide using PCD tools under ultrasonic elliptical vibration cutting〞, International Journal of Machine Tools & Manufacture, Vol. 49, pp.1089-1095, 2009
14. H. K. Park, H. Onikura, O. Ohnishi, A. Sharifuddin, 〝Development of micro-diamond tools through electroless composite plating and investigation into micro-machining characteristics〞, Precision Engineering, Vol. 34, pp.376-386, 2010
15. 張智賢, 〝桌上型雙主軸超精微CNC工具機開發與細胞鏡檢模仁製作研究〞, 國立臺灣師範大學機電科技學系碩士論文, pp.112-115, 2011
16. K. Katahira, K. Nakamoto, P. Fonda, H. Ohmori, K. Yamazaki, 〝A novel technique for reconditioning polycrystalline diamond tool surfaces applied for silicon micromachining〞, CIRP Annals-Manufacturing Technology, Vol. 60, pp.591-594, 2011
17. 斯東光電有限公司, 〝非球面的應用〞, http://www.stoneoptics.com/newsxx.asp?idx=81
18. 趙崇禮,馬廣仁,林宏彞,微模具製程技術發展現況,機械工業雜誌,第279期,2006,pp.43-52
19. 楊錫杭,黃俊瑋,紫外光固化膠製作微透鏡陣列之新式製程研究,中國機械工程學會第21屆全國學術研討會論文集,2004,pp.5055-5060
20. W.K. Chen, T. Kuriyagawa, H. Huang, N. Yosihara,〝Machining of micro aspherical mould inserts〞, Precision Engineering, Vol.29, pp.315-323, 2005
21. K.-S. Jung, H.-M. Kim, S.-J. Lee, N.-C. Park, S.-I. Kang, Y.-P. Park,〝Design of optical path of pickup for small form factor optical disk drive〞, Microsyst Technol, Vol. 11, pp. 1041-1047, 2005
22. C.S. Lim, M.H. Hong, A. Senthil Kumar, M. Rahman, X.D. Liu, 〝Fabrication of concave micro lens array using laser patterning and isotropic etching〞, International Journal of Machine Tools & Manufacture, Vol. 46, pp. 552-558, 2006
23. Y. Takeuchi, Y. Yoneyama, T. Ishida, T. Kawai,〝6-Axis control ultraprecision microgrooving on sculptured surfaces with non-rotational cutting tool〞, CIRP Annals - Manufacturing Technology, Vol.58, pp.53-56, 2009
24. B. Lee, Kyung J. Cha, T. H. Kwon,〝Fabrication of polymer micro/nano-hybrid lens array by microstructured anodic aluminum oxide (AAO) mold〞, Microelectronic Engineering, Vol. 86, pp. 857-860, 2009
25. J. Yan, Z. Zhang, T. Kuriyagawa,〝Tool wear control in diamond turning of high-strength mold materials by means of tool swinging〞, CIRP Annals - Manufacturing Technology, Vol.59, pp.109-112, 2010
26. T. Zhou, J. Yan, T. Kuriyagawa,〝Study on nonisothermal glass molding press for aspherical lens〞, Journal of advanced mechanical design,system,and Manufacturing, Vol. 4, pp. 806-815, 2010
27. J. Yan, Z. Zhang, T. Kuriyagawa, H. Gonda,〝Fabricating micro-structured surface y using single-crystalline diamond endmill〞, Int J Adv Manuf Technol, Vol. 51, pp. 957-964, 2010
28. D. H. Cha, H. S. Park, Y. Hwang, J. H. Kim, H. J. Kim,〝Experimental Study of Glass Molding Process and Transcription Characteristics of Mold Surface in Molding of Aspheric Glass Lenses〞, Optical review, Vol. 18, pp.241-246, 2011
29. A. Beaucamp, Y. Namba, I. Inasaki, H. Combrinck, R. Freeman,〝Finishing of optical moulds to l/20 by automated corrective polishing〞, CIRP Annals - Manufacturing Technology, Vol.60, pp.375-378, 2011
30. Sakshat virtual labs,〝To study erosion mechanism from Lazarenko's model〞, http://coep.vlab.co.in/?sub=34&brch=105&sim=237&cnt=1
31. Charmilles technologies ROBOFIL 300, pp. 1.1.4-1.1.5, 1993
32. C. Sommer, Non-traditional machining handbook, Advance Publishing, Inc., pp.117-124, 2000
33. Bilbao, SPAIN, 〝Proceedings of the 13th International Symposium for electromachining isem XIII〞, May 9th-11th, pp.4, 2001
34. 陳順同,〝精微製造工程〞, 講義, 2011
35. 機械技術雜誌編輯部,〝二十一世紀的顯學微機電系統(四)-微放電精密加工,機械技術雜誌〞, pp. 220-222, 2000
36. 蕭瑞陽,〝放電加工原理與應用-線切割放電加工〞,
http://eshare.stut.edu.tw/EshareFile/2010_4/2010_4_e1e12437.ppt/
37. K. Okano, Y. Akiba, T. Kurosu, M. Iida, T. akamura,〝Synthesis of B-doped diamond film〞, Journal of Crystal Growth, Vol. 99, pp.1192-1195, 1990
38. C. Sommer, Non-traditional machining handbook, Advance Publishing, Inc., pp.117-124,2000
39. S. Kalpakjian, S. R. Schmid, Manufacturing engineering and tehnology, Prentice Hall International, 4th edition, pp.803-810, 2001
40. 厚利貿易股份有限公司, 高週波熱處理,
http://www.sunholy.com.tw/epaper/NO.77/77.pdf
41. 達訊感應科技股份有限公司, 高週波加熱機, http://www.allma.net/all-induction/tw_af-12kw.php
42. I. S. Kang, J. S. Kim, J. H. Kim, M. C. Kang, Y. W. Seo,〝A mechanistic model of cutting force in the micro end milling process〞, Journal of Materials Processing Technology, Vol. 87, pp. 250-255, 2007
43. X. M. Lai, H. T. Li, C. F. Li, Z. Q. Lin, J. Ni,〝Modelling and analysis of micro scale milling considering size effect, micro cutter edge radius and minimum chip thickness〞, Journal of Machine Tools and Manufacture, Vol. 48, pp.1-14, 2008
44. S. M. Son, H. S. Lim, J. H. Ahn,〝Effects of the friction coefficient on the minimum cutting thickness in micro cutting〞, Journal of Machine Tools and Manufacture, Vol.45, pp.529-535, 2005
45. 倪軍,〝Proceeding of Some recent advancement in Micro/Meso scale manufacturing〞, University of Michigan, 2004
46. 庄司克雄, 超精密加工と非球面加工, NTS, ISBN4-8043-059-X C3050, 2004
47. S. Blackeley, R. O. Scattergood,〝Mechanics of material removal in diamond turning〞, Proceedings of ASPE Annual Meeting, Rochester NY, USA, pp. 68-71, 1990
48. M. Miyashita,〝Ist Annual Precision Engineering Conference〞, North Carolina State University, Raleigh, NC, November 1985
49. B. K. A. Ngoi, P. S. Sreejith,〝Ductile Regime Finish Machining-A Review〞, Int J Adv Manuf Technol, Vol. 16, pp. 547-550, 2000
50. 維基百科, 腐蝕, http://zh.wikipedia.org/wiki/%E8%85%90%E8%9A%80
51. 慶鴻機電, 線切割機保養手冊, B1 edition, 2008
52. NAKANISHI INC., Motors& Spindles Micro-grinders, 9th edition, pp.2-9&2-29, 2008
53. 台中精機, 立式綜合加工機http://www.or.com.tw/uploads/product/OR_Vcenter_55_70.pdf
54. 黃瑋平, 〝低成本高剛性微型工具機開發與高精度陣列光學微模具製作研究〞, 國立臺灣師範大學機電科技學系碩士論文, pp. 67-68, 2011
55. Yung-Tien Liu, Wei-Che Chang, Yutaka Yamagata, 〝A study on optimal compensation cutting for an aspheric surface using the Taguchi method〞, Vol. 3, pp.40-48, 2010
56. 欣昊實業股份有限公司,〝MasterCAM X5〞, http://www.mastercam.com.tw/
57. 漢磊股份有限公司,〝工具顯微鏡〞, http://www.aixon.com.tw/
58. 日本電子株式會社,〝掃描式電子顯微鏡〞
59. KEYEMCE,〝雷射共焦顯微鏡〞
60. 中美科學股份有限公司,〝表面形狀輪廓儀〞
61. HORIBA,〝分析級拉曼光譜儀〞, http://www.horiba.com/cn/scientific/products/raman-spectroscopy/raman-systems/research-raman/details/t64000-140/
62. 江信有限公司,〝BD-PCD〞,
http://www.factdiamond.com/contact/main.htm
63. 璧山金屬有限公司,〝黃銅電極〞
64. 台灣安普產品有限公司, 鑽石膏http://www.taiwanservices.com.tw/org2/0/company_detail/zh_TW/158478
65. Davis, J. R., "ASM Specialty Handbook, Tool Materials", ASM International, Materials Park, OH 440730002, pp.88, 1995
66. J.L Meriam, L.G.Kraige, Engineering mechanics dynamics, 5th edition, pp.56-58, 2003
67. T.R. Anthony, W.F. Banholzer, J.F. Fleischer, L. Wei, P.K. Kuo, R.L. Thomas, and R.W. Pryor, Thermal diffusivity of isotopically enriched 12C diamond, PHYSICAL REVIEW B, Vol.42, No.2, pp.1104-1111, 1990
68. Y.A. Cengel, Heat and mass transfer, a practical approach, 3rd, McGraw-Hill, pp.74-77, 2006
69. 田中義信, 津和秀夫, 井川直哉, 精密加工技術全集, 復漢出版社, pp.275-350, 1990
70. T.Tawakoli, M.J. Hadad, M.H. Sadeghi, Influence of mist parameters on minimum quantity lubrication- MQL grinding process, International Journal of Machine Tools & Manufacture, Vol. 50, pp. 521-531, 2010
71. Taylor F W, On the art of cutting metals, Transactions of ASME, Vol.28, pp. 31-58, 1907
72. Shane A. Catledge, Yogesh K. Vohra, Ram Ladi, Ghanshyam Rai, Micro-Raman stress investigations and X-ray diffraction analysis of polycrystalline diamond (PCD) tools, Diamond and Telated Materials, Vol. 5, pp. 1159-1165, 1996