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研究生: 楊凱傑
Kai-Chieh Yang
論文名稱: 高頻振動輔助之智能化臥式精微工具機開發與Zerodur®陶瓷玻璃奈米研銑加工研究
Development of an intelligent horizontal micro machine tool with high-frequency vibration assisted machining and research of nano milling-grinding on Zerodur® glass ceramic
指導教授: 陳順同
Chen, Shun-Tong
學位類別: 碩士
Master
系所名稱: 機電工程學系
Department of Mechatronic Engineering
論文出版年: 2014
畢業學年度: 102
語文別: 中文
論文頁數: 135
中文關鍵詞: Zerodur®陶瓷玻璃含硼聚晶鑽石研銑刀具智能化研銑技術類延性模式高頻振動輔助加工
英文關鍵詞: ZERODUR® glass-ceramic, BD-PCD milling-grinding cutting tool, intellectualized milling-grinding technique, quasi-ductile regime, high-frequency vibration assisted machining
論文種類: 學術論文
相關次數: 點閱:153下載:7
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  • 本研究主要目的係針對Zerodur®陶瓷玻璃硬脆材料,開發智能化研銑加工技術。Zerodur®陶瓷玻璃具極低的熱膨脹係數,良好的物理性質與化學穩定性,適用於航太科技與各種高端精密產業元件。但由於Zerodur®陶瓷玻璃的硬脆性質,加工過程極易造成脆性破壞。為使Zerodur®陶瓷玻璃能在延性模式下加工,本研究提出一種「高頻振動輔助之智能化臥式精微工具機」的原創設計,這項設計結合自行開發的「含硼聚晶鑽石研銑刀具」、「高頻振動輔助加工」與「智能化研銑力判斷機制」等技術,使Zerodur®陶瓷玻璃能在奈米深度下進行研銑加工。為避免研銑過程中發生脆性破壞,研銑力分別以「荷重元」及「平台電流」進行線上偵測,並依回授的研銑力調整刀具進給率,透由「智能化」機制判斷,使陶瓷玻璃能在非脆性破壞模式下加工。實驗證實,本研究所提智能化研銑技術,能有效減少Zerodur®陶瓷玻璃的脆性破壞發生,並改善加工面粗度,刀具平均磨耗率可降至0.005µm/mm。此外,實驗也發現,研銑過程中導入高頻振動輔助,除了能幫助切屑排除外,更能使表面粗糙度降至Ra0.388µm,並減緩研銑刀具的磨耗至0.002µm/mm程度。一個成功的微小立方體的Zerodur®陶瓷玻璃加工實例,驗證本研究所開發的整合型技術,著實能提供Zerodur®陶瓷玻璃在延性模式(Ductile regime)或類延性模式(Quasi-ductile regime)下加工,且製程所需成本低,容易控制,深具商化價值。

    The primary purpose of the thesis is to develop an intellectualized milling-grinding technique for machining ZERODUR® glass-ceramic. ZERODUR® glass-ceramic which owns an extremely low coefficient of thermal expansion, excellent physical properties and chemical stability is very suitable for the fabrication of various micro components in aerospace and high-precision optical industry. However, brittle fracture will be easy occurred following the progress of machining such as brittle material. To machine the ZERODUR® glass-ceramic under ductile or quasi-ductile regime, an intelligent horizontal micro machine tool is developed and proposed in this study. The innovation combines a home-made boron-doped polycrystalline composite diamond (BD-PCD) tool with high-frequency vibration assisted machining and intellectualized milling-grinding force detection. The machining force measurement via the designed load-cells and the stage-current to on-line detect the force coming from machining resistance of the glass-ceramic workpiece for self-regulating the tool’s feed-rate is recommended. Milling-grinding can be implemented favorably under a non-brittle fracture regime. Experimental results indicated that the intellectualized milling-grinding technique decreases evidently the probability of brittle fracture of the machined glass, improving its surface roughness and reducing the tool wear rate down to 0.005µm per mm. Besides which, the high-frequency vibration assisted machining is also confirmed that can help in sending out the debris, improving the surface roughness (Ra 0.388µm) and alleviating the tool wear rate (0.002µm per mm). How the self-regulating feed-rate works is carefully examined and verified in the manufacture of a miniaturized cube on ZERODUR® glass-ceramic. It is demonstrated that the proposed integrated technique can achieve a machining on ductile or quasi-ductile regime on the hard-brittle glass-ceramic. The technique is inexpensive and easily controllable, which is worthy of commercialization.

    摘要 i Abstract ii 誌謝 iii 目錄 iv 表目錄 viii 圖目錄 x 符號說明 xv 第一章 緒論 1 1.1 前言 1 1.2 文獻回顧 3 1.2.1硬脆材料加工 4 1.2.2 Zerodur®材料加工與應用 7 1.2.3含硼聚晶鑽石之成形與加工應用 9 1.2.4硬脆材料高頻振動輔助加工 12 1.3 研究動機 16 1.4 研究目的 19 1.5 研究方法 19 第二章 實驗原理 21 2.1 硬脆材料之脆性延性轉換機制 21 2.2 含硼聚晶鑽石導電原理 23 2.3 放電加工原理 24 2.3.1線切割放電加工原理 25 2.4 荷重元測力原理 27 2.4.1 應變規 27 2.4.2 荷重元之研銑力感測 28 2.5 位移平台電流之研銑力感測機制 29 2.6 精密位移平台伺服控制迴路 30 2.7 壓電效應 31 第三章 實驗設備與設計 34 3.1 CNC線切割放電加工機 34 3.2 CNC立式綜合加工機 35 3.3 精微雕模放電加工機 35 3.4 荷重元感測裝置 36 3.5 壓電陶瓷與高頻振動輔助裝置 37 3.5.1 壓電陶瓷材料規格 37 3.5.2 函數波信號產生器與功率放大器 38 3.6 高速主軸導電迴路設計與應用 40 3.7 精密研磨拋光機 41 3.8 量測儀器 42 3.8.1光學工具顯微鏡 42 3.8.2 掃描式電子顯微鏡 42 3.8.3 3D雷射共軛焦顯微鏡 43 3.8.4 混合訊號示波器 44 3.8.5 X-射線單晶繞射儀 44 3.8.6 顯微拉曼散射光譜儀 45 3.9 實驗材料 46 3.9.1 零膨脹係數Zerodur®陶瓷玻璃 46 3.9.2 含硼聚晶鑽石 47 3.9.3 銅線電極 49 第四章 實驗方法 50 4.1 高頻振動輔助之智能化臥式精微工具機開發 51 4.1.1 臥式精微工具機設計 52 4.1.2 臥式精微工具機之形變與頻率分析 56 4.1.3 臥式精微工具機之製作、組裝與校正 58 4.1.4 人機操作介面開發 59 4.1.5 臥式精微工具機之穩定度校正 61 4.2 真空治具及高頻振動輔助機構設計 64 4.2.1 真空治具機構 64 4.2.2 壓電陶瓷高頻振動輔助機構 65 4.3 含硼聚晶鑽石刀具設計 66 4.3.1 精微研銑刀具造型設計與分析 66 4.3.2 含硼聚晶鑽石刀具製程開發 68 4.3.3 含硼聚晶鑽石刀具製程設計與成形 69 4.3.4 含硼聚晶鑽石刀具之石墨化分析 72 第五章 實驗驗證 75 5.1 Zerodur®陶瓷玻璃溝槽研銑實驗-荷重元感測模組 75 5.1.1 切削液加入模式影響 76 5.1.2 研銑刀具刃數影響 78 5.1.3 研銑刀具後斜角影響 80 5.1.4 研銑高速主軸轉數影響 83 5.1.5 研銑深度影響 86 5.2 Zerodur®陶瓷玻璃溝槽研銑實驗-平台電流感測模組 90 5.2.1 研銑高速主軸轉數影響 91 5.2.2 研銑深度影響 97 5.2.3 研銑進給率影響 101 5.3 高頻振動輔助加工實驗 104 5.4 智能化研銑力判斷機制 105 5.4.1 回饋判斷方法 108 5.4.2 智能化研銑力判斷機制 110 5.5 酸蝕溝槽表面實驗 112 5.6 陶瓷玻璃微結構驗證 115 5.7 含硼聚晶鑽石刀具磨耗探討 117 5.8 含硼聚晶鑽石刀具研銑後之石墨化層探討 120 第六章 結論與未來展望 123 6.1 結論 123 6.2 未來展望 126 參考文獻 128 個人簡歷 135

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